A piezoelectric micromachined ultrasonic transducer using piston-like membrane motion

Tao Wang, Renshi Sawada, Chengkuo Lee

Research output: Contribution to journalArticle

13 Citations (Scopus)

Abstract

Piezoelectric micromachined ultrasonic transducer (pMUT) is a promising candidate for the next-generation 3-D diagnostic ultrasonic imaging. However, the transmitting sensitivity of reported pMUT is not satisfied so far. Enhancement of the transmitting sensitivity hence is always desirable. In this letter, we report a piston-like pMUT. With the help of etching holes in the membrane, the mode shape becomes from Gaussian-like to piston-like, which enables higher transmitted acoustic pressure. In addition, frequency of such pMUT does not decrease after etching holes are fabricated, but slightly increases. Higher frequency for ultrasonic imaging thus is practical, and the frequency can be predicted by well-established methods. Sensitivity of 73 nm/V at 2.31 MHz is achieved for the piston-like pMUT with three rows of etching holes. Benefited from the piston-like membrane motion, the space pressure level is 5.3 dB higher than the classical pMUT.

Original languageEnglish
Article number7163549
Pages (from-to)957-959
Number of pages3
JournalIEEE Electron Device Letters
Volume36
Issue number9
DOIs
Publication statusPublished - Sep 1 2015

Fingerprint

Ultrasonic transducers
Piezoelectric transducers
Pistons
Membranes
Ultrasonic imaging
Etching
Acoustics

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

Cite this

A piezoelectric micromachined ultrasonic transducer using piston-like membrane motion. / Wang, Tao; Sawada, Renshi; Lee, Chengkuo.

In: IEEE Electron Device Letters, Vol. 36, No. 9, 7163549, 01.09.2015, p. 957-959.

Research output: Contribution to journalArticle

Wang, Tao ; Sawada, Renshi ; Lee, Chengkuo. / A piezoelectric micromachined ultrasonic transducer using piston-like membrane motion. In: IEEE Electron Device Letters. 2015 ; Vol. 36, No. 9. pp. 957-959.
@article{b7a68c0099dc4ee6a22a7d5c81962372,
title = "A piezoelectric micromachined ultrasonic transducer using piston-like membrane motion",
abstract = "Piezoelectric micromachined ultrasonic transducer (pMUT) is a promising candidate for the next-generation 3-D diagnostic ultrasonic imaging. However, the transmitting sensitivity of reported pMUT is not satisfied so far. Enhancement of the transmitting sensitivity hence is always desirable. In this letter, we report a piston-like pMUT. With the help of etching holes in the membrane, the mode shape becomes from Gaussian-like to piston-like, which enables higher transmitted acoustic pressure. In addition, frequency of such pMUT does not decrease after etching holes are fabricated, but slightly increases. Higher frequency for ultrasonic imaging thus is practical, and the frequency can be predicted by well-established methods. Sensitivity of 73 nm/V at 2.31 MHz is achieved for the piston-like pMUT with three rows of etching holes. Benefited from the piston-like membrane motion, the space pressure level is 5.3 dB higher than the classical pMUT.",
author = "Tao Wang and Renshi Sawada and Chengkuo Lee",
year = "2015",
month = "9",
day = "1",
doi = "10.1109/LED.2015.2459075",
language = "English",
volume = "36",
pages = "957--959",
journal = "IEEE Electron Device Letters",
issn = "0741-3106",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "9",

}

TY - JOUR

T1 - A piezoelectric micromachined ultrasonic transducer using piston-like membrane motion

AU - Wang, Tao

AU - Sawada, Renshi

AU - Lee, Chengkuo

PY - 2015/9/1

Y1 - 2015/9/1

N2 - Piezoelectric micromachined ultrasonic transducer (pMUT) is a promising candidate for the next-generation 3-D diagnostic ultrasonic imaging. However, the transmitting sensitivity of reported pMUT is not satisfied so far. Enhancement of the transmitting sensitivity hence is always desirable. In this letter, we report a piston-like pMUT. With the help of etching holes in the membrane, the mode shape becomes from Gaussian-like to piston-like, which enables higher transmitted acoustic pressure. In addition, frequency of such pMUT does not decrease after etching holes are fabricated, but slightly increases. Higher frequency for ultrasonic imaging thus is practical, and the frequency can be predicted by well-established methods. Sensitivity of 73 nm/V at 2.31 MHz is achieved for the piston-like pMUT with three rows of etching holes. Benefited from the piston-like membrane motion, the space pressure level is 5.3 dB higher than the classical pMUT.

AB - Piezoelectric micromachined ultrasonic transducer (pMUT) is a promising candidate for the next-generation 3-D diagnostic ultrasonic imaging. However, the transmitting sensitivity of reported pMUT is not satisfied so far. Enhancement of the transmitting sensitivity hence is always desirable. In this letter, we report a piston-like pMUT. With the help of etching holes in the membrane, the mode shape becomes from Gaussian-like to piston-like, which enables higher transmitted acoustic pressure. In addition, frequency of such pMUT does not decrease after etching holes are fabricated, but slightly increases. Higher frequency for ultrasonic imaging thus is practical, and the frequency can be predicted by well-established methods. Sensitivity of 73 nm/V at 2.31 MHz is achieved for the piston-like pMUT with three rows of etching holes. Benefited from the piston-like membrane motion, the space pressure level is 5.3 dB higher than the classical pMUT.

UR - http://www.scopus.com/inward/record.url?scp=84940397554&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84940397554&partnerID=8YFLogxK

U2 - 10.1109/LED.2015.2459075

DO - 10.1109/LED.2015.2459075

M3 - Article

AN - SCOPUS:84940397554

VL - 36

SP - 957

EP - 959

JO - IEEE Electron Device Letters

JF - IEEE Electron Device Letters

SN - 0741-3106

IS - 9

M1 - 7163549

ER -