A simple and low-cost technique for fabricating microchannels and microstructures with high aspect ratio

Daisuke Onoshima, Jun Wang, Michihiko Aki, Kenji Arinaga, Noritada Kaji, Manabu Tokeshi, Shozo Fujita, Naoki Yokoyama, Yoshinobu Baba

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

We developed a simple method for creating high-aspect-ratio (> 4) structures with sharp edge by using the lamination forming of a commercially available dry film photoresist in a conventional photolithography process. This type of fluidic structure is attractive to achieve a good separation and an ultra-sensitive detection of the liquid in microchannels readily.

Original languageEnglish
Title of host publicationProceedings of Conference, MicroTAS 2009 - The 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences
PublisherChemical and Biological Microsystems Society
Pages1587-1589
Number of pages3
ISBN (Print)9780979806421
Publication statusPublished - 2009
Externally publishedYes
Event13th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2009 - Jeju, Korea, Republic of
Duration: Nov 1 2009Nov 5 2009

Publication series

NameProceedings of Conference, MicroTAS 2009 - The 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences

Other

Other13th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2009
CountryKorea, Republic of
CityJeju
Period11/1/0911/5/09

All Science Journal Classification (ASJC) codes

  • Chemical Engineering (miscellaneous)
  • Bioengineering

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  • Cite this

    Onoshima, D., Wang, J., Aki, M., Arinaga, K., Kaji, N., Tokeshi, M., Fujita, S., Yokoyama, N., & Baba, Y. (2009). A simple and low-cost technique for fabricating microchannels and microstructures with high aspect ratio. In Proceedings of Conference, MicroTAS 2009 - The 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences (pp. 1587-1589). (Proceedings of Conference, MicroTAS 2009 - The 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences). Chemical and Biological Microsystems Society.