TY - GEN
T1 - A simple and low-cost technique for fabricating microchannels and microstructures with high aspect ratio
AU - Onoshima, Daisuke
AU - Wang, Jun
AU - Aki, Michihiko
AU - Arinaga, Kenji
AU - Kaji, Noritada
AU - Tokeshi, Manabu
AU - Fujita, Shozo
AU - Yokoyama, Naoki
AU - Baba, Yoshinobu
PY - 2009
Y1 - 2009
N2 - We developed a simple method for creating high-aspect-ratio (> 4) structures with sharp edge by using the lamination forming of a commercially available dry film photoresist in a conventional photolithography process. This type of fluidic structure is attractive to achieve a good separation and an ultra-sensitive detection of the liquid in microchannels readily.
AB - We developed a simple method for creating high-aspect-ratio (> 4) structures with sharp edge by using the lamination forming of a commercially available dry film photoresist in a conventional photolithography process. This type of fluidic structure is attractive to achieve a good separation and an ultra-sensitive detection of the liquid in microchannels readily.
UR - http://www.scopus.com/inward/record.url?scp=84870184757&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84870184757&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:84870184757
SN - 9780979806421
T3 - Proceedings of Conference, MicroTAS 2009 - The 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences
SP - 1587
EP - 1589
BT - Proceedings of Conference, MicroTAS 2009 - The 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences
PB - Chemical and Biological Microsystems Society
T2 - 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2009
Y2 - 1 November 2009 through 5 November 2009
ER -