A stitching figure profiler of large X-ray mirrors using RADSI for subaperture data acquisition

Takashi Kimura, Haruhiko Ohashi, Hidekazu Mimura, Daisuke Yamakawa, Hirokatsu Yumoto, Satoshi Matsuyama, Takashi Tsumura, Hiromi Okada, Tatsuhiko Masunaga, Yasunori Senba, Shunji Goto, Tetsuya Ishikawa, Kazuto Yamauchi

Research output: Contribution to journalArticle

27 Citations (Scopus)

Abstract

In the third- and coming fourth-generation synchrotron radiation facilities, X-rays having both high brightness and high coherency can be utilized. Such X-rays require high accuracy in the reflective optics. In this study, we developed an ultra-precise measurement instrumentation for tangentially long X-ray mirrors using a Fizeau interferometer. In the system, the mirror figure is measured by stitching the subaperture profiles measured by the relative-angle determinable stitching interferometry, which we developed previously. High measurement accuracy of approximately 2 nm (peak to valley) was achieved in the measurement of a 400 mm-long aspherical surface.

Original languageEnglish
Pages (from-to)229-232
Number of pages4
JournalNuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
Volume616
Issue number2-3
DOIs
Publication statusPublished - May 1 2010
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Nuclear and High Energy Physics
  • Instrumentation

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    Kimura, T., Ohashi, H., Mimura, H., Yamakawa, D., Yumoto, H., Matsuyama, S., Tsumura, T., Okada, H., Masunaga, T., Senba, Y., Goto, S., Ishikawa, T., & Yamauchi, K. (2010). A stitching figure profiler of large X-ray mirrors using RADSI for subaperture data acquisition. Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 616(2-3), 229-232. https://doi.org/10.1016/j.nima.2009.11.014