An electro-optic (EO) modulator composed of an EO polymer/titanium dioxide (TiO2) hybrid waveguide has been designed and fabricated. By using a TiO2 strip line (0.3×0.3μm2 cross-section) as the core, the confinement factor in the EO polymer is optimized, thus achieving a high EO activity. The coplanar electrode spacing is tuned to enable an effective poling and a small propagation loss. The measured in-device EO coefficient is 100pm/V at 1550nm, with a driving voltage (Vπ) 3.2V for the 12mm-electrode length. The results also predict a possible Vπ of ∼1V in a push-pull MZI structure. The EO activity of the modulator exhibited an excellent temporal stability at 85°C for 500 h due to the high glass transition temperature of the EO polymer and the temperature-insensitive TiO2 strip line.
All Science Journal Classification (ASJC) codes
- Physics and Astronomy (miscellaneous)