A study of electron energy distributions in an inductively coupled plasma by laser Thomson scattering

T. Hori, M. Kogano, M. D. Bowden, Kiichiro Uchino, K. Muraoka

Research output: Contribution to journalArticle

42 Citations (Scopus)

Abstract

The electron energy distribution function (eedf) in an inductively coupled plasma was studied using the method of laser Thomson scattering. eedfs were measured for various plasma conditions, at different gas pressures, and at different input rf powers. In high electron density plasmas, the eedf was observed to be Maxwellian, while in low electron density plasmas, a non-Maxwellian eedf was observed. The transition between Maxwellian and non-Maxwellian eedfs was attributed to the thermalization of the electron population in higher density plasmas. In order to completely characterize the eedf, spatial and temporal dependencies were measured and measurements were also made in the afterglow period of a pulsed discharge. Discussions are made of the electron behavior and the shape of the eedf.

Original languageEnglish
Pages (from-to)1909-1916
Number of pages8
JournalJournal of Applied Physics
Volume83
Issue number4
DOIs
Publication statusPublished - Feb 15 1998

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Thomson scattering
energy distribution
distribution functions
electron energy
lasers
spatial dependencies
afterglows
plasma density
gas pressure
electrons

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

Cite this

A study of electron energy distributions in an inductively coupled plasma by laser Thomson scattering. / Hori, T.; Kogano, M.; Bowden, M. D.; Uchino, Kiichiro; Muraoka, K.

In: Journal of Applied Physics, Vol. 83, No. 4, 15.02.1998, p. 1909-1916.

Research output: Contribution to journalArticle

Hori, T. ; Kogano, M. ; Bowden, M. D. ; Uchino, Kiichiro ; Muraoka, K. / A study of electron energy distributions in an inductively coupled plasma by laser Thomson scattering. In: Journal of Applied Physics. 1998 ; Vol. 83, No. 4. pp. 1909-1916.
@article{3fb2ee2438764f4c8036a38c70c9975b,
title = "A study of electron energy distributions in an inductively coupled plasma by laser Thomson scattering",
abstract = "The electron energy distribution function (eedf) in an inductively coupled plasma was studied using the method of laser Thomson scattering. eedfs were measured for various plasma conditions, at different gas pressures, and at different input rf powers. In high electron density plasmas, the eedf was observed to be Maxwellian, while in low electron density plasmas, a non-Maxwellian eedf was observed. The transition between Maxwellian and non-Maxwellian eedfs was attributed to the thermalization of the electron population in higher density plasmas. In order to completely characterize the eedf, spatial and temporal dependencies were measured and measurements were also made in the afterglow period of a pulsed discharge. Discussions are made of the electron behavior and the shape of the eedf.",
author = "T. Hori and M. Kogano and Bowden, {M. D.} and Kiichiro Uchino and K. Muraoka",
year = "1998",
month = "2",
day = "15",
doi = "10.1063/1.366915",
language = "English",
volume = "83",
pages = "1909--1916",
journal = "Journal of Applied Physics",
issn = "0021-8979",
publisher = "American Institute of Physics Publising LLC",
number = "4",

}

TY - JOUR

T1 - A study of electron energy distributions in an inductively coupled plasma by laser Thomson scattering

AU - Hori, T.

AU - Kogano, M.

AU - Bowden, M. D.

AU - Uchino, Kiichiro

AU - Muraoka, K.

PY - 1998/2/15

Y1 - 1998/2/15

N2 - The electron energy distribution function (eedf) in an inductively coupled plasma was studied using the method of laser Thomson scattering. eedfs were measured for various plasma conditions, at different gas pressures, and at different input rf powers. In high electron density plasmas, the eedf was observed to be Maxwellian, while in low electron density plasmas, a non-Maxwellian eedf was observed. The transition between Maxwellian and non-Maxwellian eedfs was attributed to the thermalization of the electron population in higher density plasmas. In order to completely characterize the eedf, spatial and temporal dependencies were measured and measurements were also made in the afterglow period of a pulsed discharge. Discussions are made of the electron behavior and the shape of the eedf.

AB - The electron energy distribution function (eedf) in an inductively coupled plasma was studied using the method of laser Thomson scattering. eedfs were measured for various plasma conditions, at different gas pressures, and at different input rf powers. In high electron density plasmas, the eedf was observed to be Maxwellian, while in low electron density plasmas, a non-Maxwellian eedf was observed. The transition between Maxwellian and non-Maxwellian eedfs was attributed to the thermalization of the electron population in higher density plasmas. In order to completely characterize the eedf, spatial and temporal dependencies were measured and measurements were also made in the afterglow period of a pulsed discharge. Discussions are made of the electron behavior and the shape of the eedf.

UR - http://www.scopus.com/inward/record.url?scp=0031998191&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0031998191&partnerID=8YFLogxK

U2 - 10.1063/1.366915

DO - 10.1063/1.366915

M3 - Article

AN - SCOPUS:0031998191

VL - 83

SP - 1909

EP - 1916

JO - Journal of Applied Physics

JF - Journal of Applied Physics

SN - 0021-8979

IS - 4

ER -