A study of electron energy distributions in an inductively coupled plasma by laser Thomson scattering

T. Hori, M. Kogano, M. D. Bowden, K. Uchino, K. Muraoka

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42 Citations (Scopus)

Abstract

The electron energy distribution function (eedf) in an inductively coupled plasma was studied using the method of laser Thomson scattering. eedfs were measured for various plasma conditions, at different gas pressures, and at different input rf powers. In high electron density plasmas, the eedf was observed to be Maxwellian, while in low electron density plasmas, a non-Maxwellian eedf was observed. The transition between Maxwellian and non-Maxwellian eedfs was attributed to the thermalization of the electron population in higher density plasmas. In order to completely characterize the eedf, spatial and temporal dependencies were measured and measurements were also made in the afterglow period of a pulsed discharge. Discussions are made of the electron behavior and the shape of the eedf.

Original languageEnglish
Pages (from-to)1909-1916
Number of pages8
JournalJournal of Applied Physics
Volume83
Issue number4
DOIs
Publication statusPublished - Feb 15 1998

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

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