A study on fluorescence polarization method for analyzing diffusional movement of abrasive grain in CMP slurry

Research output: Contribution to conferencePaperpeer-review

Abstract

In this paper, we suggest a novel evaluation method of translational Brownian motion of nano-abrasives in CMP slurry. The slurry is complex composite and the viscosity is not uniform during the translational motion of nano-abrasives. We apply the fluorescence anisotropy analysis to measure the integration of viscosity. The viscosity for the area where the abrasive nano-particles passing through in their translational motion is integrated in order to determine the average of the translational diffusion coefficient.

Original languageEnglish
Publication statusPublished - Oct 18 2015
Event8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015 - Kyoto, Japan
Duration: Oct 18 2015Oct 22 2015

Other

Other8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015
CountryJapan
CityKyoto
Period10/18/1510/22/15

All Science Journal Classification (ASJC) codes

  • Industrial and Manufacturing Engineering

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