A study on fluorescence polarization method for analyzing diffusional movement of abrasive grain in CMP slurry

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper, we suggest a novel evaluation method of translational Brownian motion of nano-abrasives in CMP slurry. The slurry is complex composite and the viscosity is not uniform during the translational motion of nano-abrasives. We apply the fluorescence anisotropy analysis to measure the integration of viscosity. The viscosity for the area where the abrasive nano-particles passing through in their translational motion is integrated in order to determine the average of the translational diffusion coefficient.

Original languageEnglish
Title of host publicationProceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015
PublisherJapan Society of Mechanical Engineers
Publication statusPublished - Oct 18 2015
Event8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015 - Kyoto, Japan
Duration: Oct 18 2015Oct 22 2015

Other

Other8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015
CountryJapan
CityKyoto
Period10/18/1510/22/15

Fingerprint

Abrasives
Fluorescence
Viscosity
Polarization
Brownian movement
Anisotropy
Composite materials

All Science Journal Classification (ASJC) codes

  • Industrial and Manufacturing Engineering

Cite this

Hayashi, T., Seri, T., & Kurokawa, S. (2015). A study on fluorescence polarization method for analyzing diffusional movement of abrasive grain in CMP slurry. In Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015 Japan Society of Mechanical Engineers.

A study on fluorescence polarization method for analyzing diffusional movement of abrasive grain in CMP slurry. / Hayashi, Terutake; Seri, Toshiki; Kurokawa, Syuhei.

Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015. Japan Society of Mechanical Engineers, 2015.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Hayashi, T, Seri, T & Kurokawa, S 2015, A study on fluorescence polarization method for analyzing diffusional movement of abrasive grain in CMP slurry. in Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015. Japan Society of Mechanical Engineers, 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015, Kyoto, Japan, 10/18/15.
Hayashi T, Seri T, Kurokawa S. A study on fluorescence polarization method for analyzing diffusional movement of abrasive grain in CMP slurry. In Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015. Japan Society of Mechanical Engineers. 2015
Hayashi, Terutake ; Seri, Toshiki ; Kurokawa, Syuhei. / A study on fluorescence polarization method for analyzing diffusional movement of abrasive grain in CMP slurry. Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015. Japan Society of Mechanical Engineers, 2015.
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