A study on the physical properties of AZO films as variation of sputtering conditions

Yun Hae Kim, Seung Jun An, Joon Young Kim, Kyung Man Moon, Pangpang Wang, Dongyan Zhang, Ri Ichi Murakami

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

TCO (transparent conducting oxide) films are widely used as photoelectric devices in flat panel displays and solar cells. Until now, ITO (indium-tin oxide) films have been used as TCO films. However, with the increase in the cost of ITO films, researchers have been searching for new materials to use as TCO films. Transparent and conductive aluminum-doped zinc oxide films were prepared by DC magnetron sputtering at different substrate temperatures. The electric and optical properties of these films were studied by Hall measurement and optical spectroscopy, respectively. All of the films that were deposited at temperatures higher than 200 °C substrate temperature demonstrated over 80% transmittance in the range of the visible spectrum. Since the surface mobility of a particle is limited at a low temperature, the growth rate of AZO thin films would be higher than that at a high temperature. And the films showed minimum resistivity of 6.77 × 10-3 Ω·cm at substrate temperature of 200 °C.

Original languageEnglish
Title of host publicationApplications of Engineering Materials
Pages54-57
Number of pages4
DOIs
Publication statusPublished - Aug 12 2011
Event2011 International Conference on Advanced Engineering Materials and Technology, AEMT 2011 - Sanya, China
Duration: Jul 29 2011Jul 31 2011

Publication series

NameAdvanced Materials Research
Volume287-290
ISSN (Print)1022-6680

Other

Other2011 International Conference on Advanced Engineering Materials and Technology, AEMT 2011
CountryChina
CitySanya
Period7/29/117/31/11

Fingerprint

Oxide films
Sputtering
Physical properties
Tin oxides
Indium
Temperature
Photoelectric devices
Substrates
Flat panel displays
Zinc oxide
Magnetron sputtering
Solar cells
Electric properties
Optical properties
Aluminum
Thin films
Costs

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Kim, Y. H., An, S. J., Kim, J. Y., Moon, K. M., Wang, P., Zhang, D., & Murakami, R. I. (2011). A study on the physical properties of AZO films as variation of sputtering conditions. In Applications of Engineering Materials (pp. 54-57). (Advanced Materials Research; Vol. 287-290). https://doi.org/10.4028/www.scientific.net/AMR.287-290.54

A study on the physical properties of AZO films as variation of sputtering conditions. / Kim, Yun Hae; An, Seung Jun; Kim, Joon Young; Moon, Kyung Man; Wang, Pangpang; Zhang, Dongyan; Murakami, Ri Ichi.

Applications of Engineering Materials. 2011. p. 54-57 (Advanced Materials Research; Vol. 287-290).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Kim, YH, An, SJ, Kim, JY, Moon, KM, Wang, P, Zhang, D & Murakami, RI 2011, A study on the physical properties of AZO films as variation of sputtering conditions. in Applications of Engineering Materials. Advanced Materials Research, vol. 287-290, pp. 54-57, 2011 International Conference on Advanced Engineering Materials and Technology, AEMT 2011, Sanya, China, 7/29/11. https://doi.org/10.4028/www.scientific.net/AMR.287-290.54
Kim YH, An SJ, Kim JY, Moon KM, Wang P, Zhang D et al. A study on the physical properties of AZO films as variation of sputtering conditions. In Applications of Engineering Materials. 2011. p. 54-57. (Advanced Materials Research). https://doi.org/10.4028/www.scientific.net/AMR.287-290.54
Kim, Yun Hae ; An, Seung Jun ; Kim, Joon Young ; Moon, Kyung Man ; Wang, Pangpang ; Zhang, Dongyan ; Murakami, Ri Ichi. / A study on the physical properties of AZO films as variation of sputtering conditions. Applications of Engineering Materials. 2011. pp. 54-57 (Advanced Materials Research).
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