A study on the scribing of FTO using pulsed Nd=YAG laser

Hee Je Kim, Sung Joon Park, Min Kyu Son, Dong Kil Lee, Kyoung Jun Lee

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Abstract

In material processing, a laser system with optimal laser parameters has been considered to be significant. Especially, the laser scribing technology is thought to be very important for fabricating DSSC(Dye sensitized solar cell) modules with good quality. Moreover, the TEM00 mode laser beam is the most dominant factor to decide the IPCE(Incident photon to current conversion efficiency) characteristics. In order to get the TEM00 mode, a pin-hole is inserted within a simple pulsed Nd:YAG laser resonator. And the spatial field distribution is measured by using three size pin-hole diameters of 2.0, 6.0 mm respectively. At that moment, each case has the same laser beam energy by adjusting the discharge voltage and pps(pulse per second). From those results, it is known that the pin-hole size of 2.0 mm has the perfect TEM 00 mode. In addition, at the charging voltage of 1000 V, 10 pps and the feeding speed of 1.11 mm/sec, the SEM photo of FTO(Fluorine-doped tin oxide) thin film layers shows the best scribing trace.

Original languageEnglish
Pages (from-to)1407-1411
Number of pages5
JournalTransactions of the Korean Institute of Electrical Engineers
Volume57
Issue number8
Publication statusPublished - Aug 2008

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

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  • Cite this

    Kim, H. J., Park, S. J., Son, M. K., Lee, D. K., & Lee, K. J. (2008). A study on the scribing of FTO using pulsed Nd=YAG laser. Transactions of the Korean Institute of Electrical Engineers, 57(8), 1407-1411.