A three-dimensional MEMS optical switching module having 100 input and 100 output ports

Tsuyoshi Yamamoto, Johji Yamaguchi, Nobuyuki Takeuchi, Akira Shimizu, Eiji Figurashi, Renshi Sawada, Yuji Uenishi

    Research output: Contribution to journalArticlepeer-review

    33 Citations (Scopus)

    Abstract

    This paper describes an optical switching module based on microelectromechanical systems (MEMS) two-axis tilt mirror arrays and low-cost highly accurate free-space optics. The MEMS mirror arrays are integrated on single-crystal silicon wafers and provide reliable switching operation at a low driving voltage. The free-space optics consists of two-dimensional optical fiber and microlens arrays based on low-cost and highly accurate polymer-based components. They provide a compact switching module (approximately 80 × 60 × 35mm [170 cc]) and are assembled passively by using dowel pins. A prototype switch module with 100-ch optical fiber I/O has a low coupling loss of 4.0 dB, a low crosstalk within -60 dB, and switching time of 3 ms.

    Original languageEnglish
    Pages (from-to)1360-1362
    Number of pages3
    JournalIEEE Photonics Technology Letters
    Volume15
    Issue number10
    DOIs
    Publication statusPublished - Oct 2003

    All Science Journal Classification (ASJC) codes

    • Electronic, Optical and Magnetic Materials
    • Atomic and Molecular Physics, and Optics
    • Electrical and Electronic Engineering

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