A Transition Edge Sensor Microcalorimeter System for the Energy Dispersive Spectroscopy Performed on a Scanning-Transmission Electron Microscope

Keisuke Maehata, T. Hara, K. Mitsuda, M. Hidaka, K. Tanaka, Y. Yamanaka

Research output: Contribution to journalArticle

12 Citations (Scopus)

Abstract

We are conducting the development of a transition edge sensor (TES) microcalorimeter system for energy-dispersive X-ray spectroscopy (EDS), performed using a scanning-transmission electron microscope (STEM). The operating temperature of the TES microcalorimeter was maintained using a compact dry 3 He- 4 He dilution refrigerator. This was pre-cooled by a remote helium cooling loop system and a Gifford-McMahon cooler. These conditions allowed for high-resolution STEM imaging to be achieved. A single-pixel TES microcalorimeter with a polycapillary optic was selected to demonstrate the analytical operation of the EDS system in the STEM. For a Ti-It-Pt sample, an X-ray energy resolution of 8.6 eV full-width at half maximum (FWHM) was obtained at Ir M α 1 , Pt M α 1 , and Ir M β . Using an electron device sample, element distribution maps of Si, Ti, and W were obtained using a Si K α 1 X-ray energy resolution of 9.7 eV FWHM.

Original languageEnglish
Pages (from-to)5-10
Number of pages6
JournalJournal of Low Temperature Physics
Volume184
Issue number1-2
DOIs
Publication statusPublished - Jul 1 2016

Fingerprint

calorimeters
Energy dispersive spectroscopy
Electron microscopes
electron microscopes
Full width at half maximum
Scanning
scanning
sensors
Sensors
spectroscopy
Electron devices
X rays
Helium
x rays
Refrigerators
refrigerators
operating temperature
coolers
Dilution
dilution

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics
  • Materials Science(all)
  • Condensed Matter Physics

Cite this

A Transition Edge Sensor Microcalorimeter System for the Energy Dispersive Spectroscopy Performed on a Scanning-Transmission Electron Microscope. / Maehata, Keisuke; Hara, T.; Mitsuda, K.; Hidaka, M.; Tanaka, K.; Yamanaka, Y.

In: Journal of Low Temperature Physics, Vol. 184, No. 1-2, 01.07.2016, p. 5-10.

Research output: Contribution to journalArticle

@article{15fbfda6f1bc493db4618a58590c48cd,
title = "A Transition Edge Sensor Microcalorimeter System for the Energy Dispersive Spectroscopy Performed on a Scanning-Transmission Electron Microscope",
abstract = "We are conducting the development of a transition edge sensor (TES) microcalorimeter system for energy-dispersive X-ray spectroscopy (EDS), performed using a scanning-transmission electron microscope (STEM). The operating temperature of the TES microcalorimeter was maintained using a compact dry 3 He- 4 He dilution refrigerator. This was pre-cooled by a remote helium cooling loop system and a Gifford-McMahon cooler. These conditions allowed for high-resolution STEM imaging to be achieved. A single-pixel TES microcalorimeter with a polycapillary optic was selected to demonstrate the analytical operation of the EDS system in the STEM. For a Ti-It-Pt sample, an X-ray energy resolution of 8.6 eV full-width at half maximum (FWHM) was obtained at Ir M α 1 , Pt M α 1 , and Ir M β . Using an electron device sample, element distribution maps of Si, Ti, and W were obtained using a Si K α 1 X-ray energy resolution of 9.7 eV FWHM.",
author = "Keisuke Maehata and T. Hara and K. Mitsuda and M. Hidaka and K. Tanaka and Y. Yamanaka",
year = "2016",
month = "7",
day = "1",
doi = "10.1007/s10909-015-1361-3",
language = "English",
volume = "184",
pages = "5--10",
journal = "Journal of Low Temperature Physics",
issn = "0022-2291",
publisher = "Springer New York",
number = "1-2",

}

TY - JOUR

T1 - A Transition Edge Sensor Microcalorimeter System for the Energy Dispersive Spectroscopy Performed on a Scanning-Transmission Electron Microscope

AU - Maehata, Keisuke

AU - Hara, T.

AU - Mitsuda, K.

AU - Hidaka, M.

AU - Tanaka, K.

AU - Yamanaka, Y.

PY - 2016/7/1

Y1 - 2016/7/1

N2 - We are conducting the development of a transition edge sensor (TES) microcalorimeter system for energy-dispersive X-ray spectroscopy (EDS), performed using a scanning-transmission electron microscope (STEM). The operating temperature of the TES microcalorimeter was maintained using a compact dry 3 He- 4 He dilution refrigerator. This was pre-cooled by a remote helium cooling loop system and a Gifford-McMahon cooler. These conditions allowed for high-resolution STEM imaging to be achieved. A single-pixel TES microcalorimeter with a polycapillary optic was selected to demonstrate the analytical operation of the EDS system in the STEM. For a Ti-It-Pt sample, an X-ray energy resolution of 8.6 eV full-width at half maximum (FWHM) was obtained at Ir M α 1 , Pt M α 1 , and Ir M β . Using an electron device sample, element distribution maps of Si, Ti, and W were obtained using a Si K α 1 X-ray energy resolution of 9.7 eV FWHM.

AB - We are conducting the development of a transition edge sensor (TES) microcalorimeter system for energy-dispersive X-ray spectroscopy (EDS), performed using a scanning-transmission electron microscope (STEM). The operating temperature of the TES microcalorimeter was maintained using a compact dry 3 He- 4 He dilution refrigerator. This was pre-cooled by a remote helium cooling loop system and a Gifford-McMahon cooler. These conditions allowed for high-resolution STEM imaging to be achieved. A single-pixel TES microcalorimeter with a polycapillary optic was selected to demonstrate the analytical operation of the EDS system in the STEM. For a Ti-It-Pt sample, an X-ray energy resolution of 8.6 eV full-width at half maximum (FWHM) was obtained at Ir M α 1 , Pt M α 1 , and Ir M β . Using an electron device sample, element distribution maps of Si, Ti, and W were obtained using a Si K α 1 X-ray energy resolution of 9.7 eV FWHM.

UR - http://www.scopus.com/inward/record.url?scp=84947435217&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84947435217&partnerID=8YFLogxK

U2 - 10.1007/s10909-015-1361-3

DO - 10.1007/s10909-015-1361-3

M3 - Article

AN - SCOPUS:84947435217

VL - 184

SP - 5

EP - 10

JO - Journal of Low Temperature Physics

JF - Journal of Low Temperature Physics

SN - 0022-2291

IS - 1-2

ER -