A Transition Edge Sensor Microcalorimeter System for the Energy Dispersive Spectroscopy Performed on a Scanning-Transmission Electron Microscope

K. Maehata, T. Hara, K. Mitsuda, M. Hidaka, K. Tanaka, Y. Yamanaka

Research output: Contribution to journalArticlepeer-review

16 Citations (Scopus)

Abstract

We are conducting the development of a transition edge sensor (TES) microcalorimeter system for energy-dispersive X-ray spectroscopy (EDS), performed using a scanning-transmission electron microscope (STEM). The operating temperature of the TES microcalorimeter was maintained using a compact dry 3He-4He dilution refrigerator. This was pre-cooled by a remote helium cooling loop system and a Gifford-McMahon cooler. These conditions allowed for high-resolution STEM imaging to be achieved. A single-pixel TES microcalorimeter with a polycapillary optic was selected to demonstrate the analytical operation of the EDS system in the STEM. For a Ti-It-Pt sample, an X-ray energy resolution of 8.6 eV full-width at half maximum (FWHM) was obtained at Ir Mα 1, Pt Mα 1, and Ir Mβ. Using an electron device sample, element distribution maps of Si, Ti, and W were obtained using a Si Kα 1 X-ray energy resolution of 9.7 eV FWHM.

Original languageEnglish
Pages (from-to)5-10
Number of pages6
JournalJournal of Low Temperature Physics
Volume184
Issue number1-2
DOIs
Publication statusPublished - Jul 1 2016

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics
  • Materials Science(all)
  • Condensed Matter Physics

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