A trial of Fe(Se1-xTex) thin film fabrication by pulsed laser deposition using ArF excimer laser

T. Yoshimoto, Y. Ichino, Y. Yoshida, T. Kiss, M. Inoue, K. Matsumoto, A. Ichinose, H. Kai, R. Teranishi, N. Mori, M. Mukaida

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Abstract

We fabricated Fe(Se1-xTex) thin films on LSAT(100), MgO(001), R-Al2O3 substrates by ArF excimer pulsed laser deposition (ArF-PLD) and investigated pulse repetition rate dependence on film growth of Fe(Se1-xTex) thin films in ArF-PLD. Through x-ray diffraction measurements of Fe(Se1-xTex) thin films grown by ArF-PLD, 00l peaks of Fe(Se1-xTex) were confirmed in Fe(Se1-xTex) thin films grown by pulse repetition rate of 10 Hz but the 00l peaks were not confirmed in Fe(Se1-xTe x) thin films grown at 5 Hz. Atomic force microscopy (AFM) revealed that 100 ∼ 250 nm sized grains were formed on surface of the thin films grown at 10 Hz. It was found that the thin films grown at 5 Hz were formed thinner than those grown at 10 Hz, in spite of the same pulses. Energy dispersive x-ray spectroscopy (EDX) analysis revealed that composition elements of the thin films grown at 5 Hz were re-evaporated from them more than those grown at 10Hz. In ρ-T measurements of the thin films grown at 10 Hz, it was confirmed that the thin films has TConset = 6.5 ∼ 10.5 K and TC0 of the Fe(Se1-xTex) thin film on an MgO substrate is 3.9 K.

Original languageEnglish
Article number012051
JournalJournal of Physics: Conference Series
Volume234
Issue numberPART 1
DOIs
Publication statusPublished - Jan 1 2010

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All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

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