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Ab initio energetic calculations of elementary reactions relevant to low-temperature silane oxidation by gaussian-2 theory
Shigeo Kondo, Kazuaki Tokuhashi, Hidekazu Nagai, Akifumi Takahashi, Masahiro Kaise, Masaaki Sugie, Mutsumi Aoyagi, Koichi Mogi, Satoshi Minamino
Research output: Contribution to journal › Article › peer-review
14
Citations
(Scopus)