Aberration-corrected focused ion beam for time-of-flight secondary neutral mass spectrometry

Kosuke Nagata, Ken Ichi Bajo, Satoru Itose, Miyuki Matsuya, Morio Ishihara, Kiichiro Uchino, Hisayoshi Yurimoto

Research output: Contribution to journalArticlepeer-review

Abstract

A chromatic and spherical aberration corrector with liquid Ga ion metal source was developed. The aberration corrector reduced the ion probe diameter to ∼1.5 times smaller for the 69Ga+ beam in aberration correction mode compared with the corrector in non-aberration correction mode. The probe current at a given probe size is approximately two times larger in aberration correction mode than in non-aberration correction mode. The aberration-corrected focused ion beam yields higher lateral resolutions and higher sensitivities with lower acceleration voltage for the same acquisition time down to 10 nm with a current of 1 pA.

Original languageEnglish
Article number085005
JournalApplied Physics Express
Volume12
Issue number8
DOIs
Publication statusPublished - Aug 1 2019

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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