Ablation dynamics of tin micro-droplet irradiated by double pulse laser used for extreme ultraviolet lithography source

D. Nakamura, T. Akiyama, K. Okazaki, K. Tamaru, A. Takahashi, T. Okada

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

The ablation dynamics of a tin (Sn) micro-droplet by double pulse laser irradiation for the development of an extreme ultraviolet lithography source was investigated. The solid state Sn droplet target with a diameter of 30 νm was irradiated by double laser pulses from a Q-switched Nd : YAG laser and a CO2 laser, and the kinetic behaviour of debris such as Sn atoms, ions and of the dense particles from the droplet was investigated by the laser-induced fluorescence imaging method, Faraday cups and high-speed imaging, respectively. After the pre-pulse irradiation of the Nd : YAG laser, the ions were emitted towards the laser incident direction with an average kinetic energy of 3-6 keV and the dense particle cloud moved in the direction opposite to the laser incident direction with expansion by a reaction force due to the plasma expansion at a speed of approximately 500 m s-1. On the other hand, the Sn atoms were ejected in all directions from the target with a speed as fast as 20 km s-1. The expanding target was subsequently irradiated by the main pulse of the CO2 laser with a delay of 800 ns and the dense cloud almost disappeared due to main-pulse irradiation.

Original languageEnglish
Article number245210
JournalJournal of Physics D: Applied Physics
Volume41
Issue number24
DOIs
Publication statusPublished - Dec 1 2008

Fingerprint

Extreme ultraviolet lithography
Tin
Ablation
ablation
Laser pulses
tin
lithography
Lasers
pulses
lasers
irradiation
YAG lasers
Irradiation
Ions
expansion
Imaging techniques
Atoms
Q switched lasers
debris
laser induced fluorescence

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Acoustics and Ultrasonics
  • Surfaces, Coatings and Films

Cite this

Ablation dynamics of tin micro-droplet irradiated by double pulse laser used for extreme ultraviolet lithography source. / Nakamura, D.; Akiyama, T.; Okazaki, K.; Tamaru, K.; Takahashi, A.; Okada, T.

In: Journal of Physics D: Applied Physics, Vol. 41, No. 24, 245210, 01.12.2008.

Research output: Contribution to journalArticle

@article{9461a0a0f3704bf4bdffe108cb1d209e,
title = "Ablation dynamics of tin micro-droplet irradiated by double pulse laser used for extreme ultraviolet lithography source",
abstract = "The ablation dynamics of a tin (Sn) micro-droplet by double pulse laser irradiation for the development of an extreme ultraviolet lithography source was investigated. The solid state Sn droplet target with a diameter of 30 νm was irradiated by double laser pulses from a Q-switched Nd : YAG laser and a CO2 laser, and the kinetic behaviour of debris such as Sn atoms, ions and of the dense particles from the droplet was investigated by the laser-induced fluorescence imaging method, Faraday cups and high-speed imaging, respectively. After the pre-pulse irradiation of the Nd : YAG laser, the ions were emitted towards the laser incident direction with an average kinetic energy of 3-6 keV and the dense particle cloud moved in the direction opposite to the laser incident direction with expansion by a reaction force due to the plasma expansion at a speed of approximately 500 m s-1. On the other hand, the Sn atoms were ejected in all directions from the target with a speed as fast as 20 km s-1. The expanding target was subsequently irradiated by the main pulse of the CO2 laser with a delay of 800 ns and the dense cloud almost disappeared due to main-pulse irradiation.",
author = "D. Nakamura and T. Akiyama and K. Okazaki and K. Tamaru and A. Takahashi and T. Okada",
year = "2008",
month = "12",
day = "1",
doi = "10.1088/0022-3727/41/24/245210",
language = "English",
volume = "41",
journal = "Journal Physics D: Applied Physics",
issn = "0022-3727",
publisher = "IOP Publishing Ltd.",
number = "24",

}

TY - JOUR

T1 - Ablation dynamics of tin micro-droplet irradiated by double pulse laser used for extreme ultraviolet lithography source

AU - Nakamura, D.

AU - Akiyama, T.

AU - Okazaki, K.

AU - Tamaru, K.

AU - Takahashi, A.

AU - Okada, T.

PY - 2008/12/1

Y1 - 2008/12/1

N2 - The ablation dynamics of a tin (Sn) micro-droplet by double pulse laser irradiation for the development of an extreme ultraviolet lithography source was investigated. The solid state Sn droplet target with a diameter of 30 νm was irradiated by double laser pulses from a Q-switched Nd : YAG laser and a CO2 laser, and the kinetic behaviour of debris such as Sn atoms, ions and of the dense particles from the droplet was investigated by the laser-induced fluorescence imaging method, Faraday cups and high-speed imaging, respectively. After the pre-pulse irradiation of the Nd : YAG laser, the ions were emitted towards the laser incident direction with an average kinetic energy of 3-6 keV and the dense particle cloud moved in the direction opposite to the laser incident direction with expansion by a reaction force due to the plasma expansion at a speed of approximately 500 m s-1. On the other hand, the Sn atoms were ejected in all directions from the target with a speed as fast as 20 km s-1. The expanding target was subsequently irradiated by the main pulse of the CO2 laser with a delay of 800 ns and the dense cloud almost disappeared due to main-pulse irradiation.

AB - The ablation dynamics of a tin (Sn) micro-droplet by double pulse laser irradiation for the development of an extreme ultraviolet lithography source was investigated. The solid state Sn droplet target with a diameter of 30 νm was irradiated by double laser pulses from a Q-switched Nd : YAG laser and a CO2 laser, and the kinetic behaviour of debris such as Sn atoms, ions and of the dense particles from the droplet was investigated by the laser-induced fluorescence imaging method, Faraday cups and high-speed imaging, respectively. After the pre-pulse irradiation of the Nd : YAG laser, the ions were emitted towards the laser incident direction with an average kinetic energy of 3-6 keV and the dense particle cloud moved in the direction opposite to the laser incident direction with expansion by a reaction force due to the plasma expansion at a speed of approximately 500 m s-1. On the other hand, the Sn atoms were ejected in all directions from the target with a speed as fast as 20 km s-1. The expanding target was subsequently irradiated by the main pulse of the CO2 laser with a delay of 800 ns and the dense cloud almost disappeared due to main-pulse irradiation.

UR - http://www.scopus.com/inward/record.url?scp=65449126738&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=65449126738&partnerID=8YFLogxK

U2 - 10.1088/0022-3727/41/24/245210

DO - 10.1088/0022-3727/41/24/245210

M3 - Article

AN - SCOPUS:65449126738

VL - 41

JO - Journal Physics D: Applied Physics

JF - Journal Physics D: Applied Physics

SN - 0022-3727

IS - 24

M1 - 245210

ER -