TY - GEN
T1 - Ablation process of PMMA induced by irradiation with laser plasma EUV light
AU - Sugiura, Nobuhiko
AU - Torii, Shuichi
AU - Makimura, Tetsuya
AU - Ichinosawa, Yoshiyuki
AU - Okazaki, Kouta
AU - Nakamura, Daisuke
AU - Takahashi, Akihiko
AU - Okada, Tatsuo
AU - Niino, Hiroyuki
AU - Murakami, Kouichi
PY - 2013
Y1 - 2013
N2 - We have investigated ablation process of PMMA induced by irradiation with laser plasma EUV light. Appling the technique, micro-structured mold can be fabricated by transferring structures of the master PMMA plate.
AB - We have investigated ablation process of PMMA induced by irradiation with laser plasma EUV light. Appling the technique, micro-structured mold can be fabricated by transferring structures of the master PMMA plate.
UR - http://www.scopus.com/inward/record.url?scp=84885441596&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84885441596&partnerID=8YFLogxK
U2 - 10.1109/CLEOPR.2013.6600550
DO - 10.1109/CLEOPR.2013.6600550
M3 - Conference contribution
AN - SCOPUS:84885441596
SN - 9781467364751
T3 - Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
BT - 2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013
T2 - 10th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013
Y2 - 30 June 2013 through 4 July 2013
ER -