Ablation process of PMMA induced by irradiation with laser plasma EUV light

Nobuhiko Sugiura; Shuichi Torii; Tetsuya Makimura; Yoshiyuki Ichinosawa; Kouta Okazaki; Daisuke Nakamura; Akihiko Takahashi; Tatsuo Okada; Hiroyuki Niino; Kouichi Murakami

doi:10.1109/CLEOPR.2013.6600550

Ablation process of PMMA induced by irradiation with laser plasma EUV light

Nobuhiko Sugiura, Shuichi Torii, Tetsuya Makimura, Yoshiyuki Ichinosawa, Kouta Okazaki, Daisuke Nakamura, Akihiko Takahashi, Tatsuo Okada, Hiroyuki Niino, Kouichi Murakami

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We have investigated ablation process of PMMA induced by irradiation with laser plasma EUV light. Appling the technique, micro-structured mold can be fabricated by transferring structures of the master PMMA plate.

Original language	English
Title of host publication	2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013
DOIs	https://doi.org/10.1109/CLEOPR.2013.6600550
Publication status	Published - 2013
Event	10th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013 - Kyoto, Japan Duration: Jun 30 2013 → Jul 4 2013

Publication series

Name	Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

Other

Other	10th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013
Country/Territory	Japan
City	Kyoto
Period	6/30/13 → 7/4/13

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Electrical and Electronic Engineering

Access to Document

10.1109/CLEOPR.2013.6600550

Cite this

Sugiura, N., Torii, S., Makimura, T., Ichinosawa, Y., Okazaki, K., Nakamura, D., Takahashi, A., Okada, T., Niino, H., & Murakami, K. (2013). Ablation process of PMMA induced by irradiation with laser plasma EUV light. In 2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013 [6600550] (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest). https://doi.org/10.1109/CLEOPR.2013.6600550

Ablation process of PMMA induced by irradiation with laser plasma EUV light. / Sugiura, Nobuhiko; Torii, Shuichi; Makimura, Tetsuya; Ichinosawa, Yoshiyuki; Okazaki, Kouta; Nakamura, Daisuke ; Takahashi, Akihiko; Okada, Tatsuo; Niino, Hiroyuki; Murakami, Kouichi.

2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013. 2013. 6600550 (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Sugiura, N, Torii, S, Makimura, T, Ichinosawa, Y, Okazaki, K, Nakamura, D , Takahashi, A, Okada, T, Niino, H & Murakami, K 2013, Ablation process of PMMA induced by irradiation with laser plasma EUV light. in 2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013., 6600550, Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest, 10th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013, Kyoto, Japan, 6/30/13. https://doi.org/10.1109/CLEOPR.2013.6600550

Sugiura, Nobuhiko ; Torii, Shuichi ; Makimura, Tetsuya ; Ichinosawa, Yoshiyuki ; Okazaki, Kouta ; Nakamura, Daisuke ; Takahashi, Akihiko ; Okada, Tatsuo ; Niino, Hiroyuki ; Murakami, Kouichi. / Ablation process of PMMA induced by irradiation with laser plasma EUV light. 2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013. 2013. (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest).

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abstract = "We have investigated ablation process of PMMA induced by irradiation with laser plasma EUV light. Appling the technique, micro-structured mold can be fabricated by transferring structures of the master PMMA plate.",

author = "Nobuhiko Sugiura and Shuichi Torii and Tetsuya Makimura and Yoshiyuki Ichinosawa and Kouta Okazaki and Daisuke Nakamura and Akihiko Takahashi and Tatsuo Okada and Hiroyuki Niino and Kouichi Murakami",

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AU - Okazaki, Kouta

AU - Nakamura, Daisuke

AU - Takahashi, Akihiko

AU - Okada, Tatsuo

AU - Niino, Hiroyuki

AU - Murakami, Kouichi

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T3 - Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

BT - 2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013

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Y2 - 30 June 2013 through 4 July 2013

ER -

Ablation process of PMMA induced by irradiation with laser plasma EUV light

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