Abstract
We have investigated ablation process of PMMA induced by irradiation with laser plasma EUV light. Appling the technique, micro-structured mold can be fabricated by transferring structures of the master PMMA plate.
| Original language | English |
|---|---|
| Title of host publication | 2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013 |
| DOIs | |
| Publication status | Published - Oct 18 2013 |
| Event | 10th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013 - Kyoto, Japan Duration: Jun 30 2013 → Jul 4 2013 |
Other
| Other | 10th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013 |
|---|---|
| Country | Japan |
| City | Kyoto |
| Period | 6/30/13 → 7/4/13 |
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All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Electrical and Electronic Engineering
Cite this
Ablation process of PMMA induced by irradiation with laser plasma EUV light. / Sugiura, Nobuhiko; Torii, Shuichi; Makimura, Tetsuya; Ichinosawa, Yoshiyuki; Okazaki, Kouta; Nakamura, Daisuke; Takahashi, Akihiko; Okada, Tatsuo; Niino, Hiroyuki; Murakami, Kouichi.
2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013. 2013. 6600550.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Ablation process of PMMA induced by irradiation with laser plasma EUV light
AU - Sugiura, Nobuhiko
AU - Torii, Shuichi
AU - Makimura, Tetsuya
AU - Ichinosawa, Yoshiyuki
AU - Okazaki, Kouta
AU - Nakamura, Daisuke
AU - Takahashi, Akihiko
AU - Okada, Tatsuo
AU - Niino, Hiroyuki
AU - Murakami, Kouichi
PY - 2013/10/18
Y1 - 2013/10/18
N2 - We have investigated ablation process of PMMA induced by irradiation with laser plasma EUV light. Appling the technique, micro-structured mold can be fabricated by transferring structures of the master PMMA plate.
AB - We have investigated ablation process of PMMA induced by irradiation with laser plasma EUV light. Appling the technique, micro-structured mold can be fabricated by transferring structures of the master PMMA plate.
UR - http://www.scopus.com/inward/record.url?scp=84885441596&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84885441596&partnerID=8YFLogxK
U2 - 10.1109/CLEOPR.2013.6600550
DO - 10.1109/CLEOPR.2013.6600550
M3 - Conference contribution
AN - SCOPUS:84885441596
SN - 9781467364751
BT - 2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013
ER -