Absorption correction and thickness determination using the ζ factor in quantitative X-ray microanalysis

Masashi Watanabe, Zenji Horita, Minoru Nemoto

    Research output: Contribution to journalArticlepeer-review

    74 Citations (Scopus)

    Abstract

    A method is proposed for the absorption correction and thickness determination, both achieved simultaneously, in quantitative X-ray microanalysis of thin specimens using an analytical electron microscope. The method is developed by combining the extrapolation method and the differential X-ray absorption (DXA) method proposed earlier. In the combined form, the ζ factor is introduced which relates the mass thickness and the X-ray intensity normalized by the weight fraction. The proposed method, called the ζ-DXA method in this study, is applied to the Ni-Al binary system. Characteristic features of the ζ-DXA method are summarized in comparison with earlier methods for absorption correction.

    Original languageEnglish
    Pages (from-to)187-198
    Number of pages12
    JournalUltramicroscopy
    Volume65
    Issue number3-4
    DOIs
    Publication statusPublished - Oct 1996

    All Science Journal Classification (ASJC) codes

    • Electronic, Optical and Magnetic Materials
    • Atomic and Molecular Physics, and Optics
    • Instrumentation

    Fingerprint

    Dive into the research topics of 'Absorption correction and thickness determination using the ζ factor in quantitative X-ray microanalysis'. Together they form a unique fingerprint.

    Cite this