Absorption correction and thickness determination using the ζ factor in quantitative X-ray microanalysis

Masashi Watanabe, Zenji Horita, Minoru Nemoto

Research output: Contribution to journalArticle

71 Citations (Scopus)

Abstract

A method is proposed for the absorption correction and thickness determination, both achieved simultaneously, in quantitative X-ray microanalysis of thin specimens using an analytical electron microscope. The method is developed by combining the extrapolation method and the differential X-ray absorption (DXA) method proposed earlier. In the combined form, the ζ factor is introduced which relates the mass thickness and the X-ray intensity normalized by the weight fraction. The proposed method, called the ζ-DXA method in this study, is applied to the Ni-Al binary system. Characteristic features of the ζ-DXA method are summarized in comparison with earlier methods for absorption correction.

Original languageEnglish
Pages (from-to)187-198
Number of pages12
JournalUltramicroscopy
Volume65
Issue number3-4
DOIs
Publication statusPublished - Oct 1996

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Instrumentation

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