Absorption correction and thickness determination using the ζ factor in quantitative X-ray microanalysis

Masashi Watanabe, Zenji Horita, Minoru Nemoto

Research output: Contribution to journalArticle

67 Citations (Scopus)

Abstract

A method is proposed for the absorption correction and thickness determination, both achieved simultaneously, in quantitative X-ray microanalysis of thin specimens using an analytical electron microscope. The method is developed by combining the extrapolation method and the differential X-ray absorption (DXA) method proposed earlier. In the combined form, the ζ factor is introduced which relates the mass thickness and the X-ray intensity normalized by the weight fraction. The proposed method, called the ζ-DXA method in this study, is applied to the Ni-Al binary system. Characteristic features of the ζ-DXA method are summarized in comparison with earlier methods for absorption correction.

Original languageEnglish
Pages (from-to)187-198
Number of pages12
JournalUltramicroscopy
Volume65
Issue number3-4
DOIs
Publication statusPublished - Oct 1 1996

Fingerprint

X ray absorption
Microanalysis
microanalysis
X rays
x rays
Extrapolation
Electron microscopes
extrapolation
electron microscopes

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Instrumentation

Cite this

Absorption correction and thickness determination using the ζ factor in quantitative X-ray microanalysis. / Watanabe, Masashi; Horita, Zenji; Nemoto, Minoru.

In: Ultramicroscopy, Vol. 65, No. 3-4, 01.10.1996, p. 187-198.

Research output: Contribution to journalArticle

Watanabe, Masashi ; Horita, Zenji ; Nemoto, Minoru. / Absorption correction and thickness determination using the ζ factor in quantitative X-ray microanalysis. In: Ultramicroscopy. 1996 ; Vol. 65, No. 3-4. pp. 187-198.
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