Activation of electrode surface on silicon solar cell using dielectric barrier discharge

Tatsuya Sakoda, Kunihiro Matsukuma, Ichiro Araki, Youl Moon Sung, Takeshi Terakawa, Katsuhiko Furukawa

    Research output: Contribution to journalArticlepeer-review

    1 Citation (Scopus)


    To yield an activated electrode surface on a silicon solar cell, a surface treatment was examined using a dielectric barrier discharge instead of a wet cleaning technique. After the dry cleaning process using the dielectric barrier discharge, the surface state and the fill factor of the solar cell were evaluated. The results showed that the dielectric barrier discharge plasma could effectively activate the electrode surface of the solar cell in a relatively short time. Additionally, it was found that the surface treatment on finger electrodes played an essential role in the improvement of the fill factor.

    Original languageEnglish
    Pages (from-to)3275-3280
    Number of pages6
    JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
    Issue number6 A
    Publication statusPublished - Jun 2004

    All Science Journal Classification (ASJC) codes

    • Engineering(all)
    • Physics and Astronomy(all)


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