TY - JOUR
T1 - Activation of p-type dopants in 4H-SiC using hybrid super-rapid thermal annealing equipment
AU - Kinoshita, Akimasa
AU - Suzuki, Kenji
AU - Senzaki, Junji
AU - Katou, Makoto
AU - Harada, Shinsuke
AU - Okamato, Mitsuo
AU - Nishizawa, Shin Ichi
AU - Fukuda, Kenji
AU - Morigasa, Fukuyoshi
AU - Endou, Tomoyoshi
AU - Isii, Takuo
AU - Yashima, Teruyuki
PY - 2007/8/6
Y1 - 2007/8/6
N2 - Rapid thermal annealing (RTA) on areas with diameters as large as 2 in. at high temperatures using hybrid super-RTA (HSRTA) equipment is performed in this study. The HS-RTA equipment consists of an infrared annealing unit and an RF induction annealing unit for uniform annealing over a 2-in.-φ susceptor. As a result of annealing using the HS-RTA equipment, temperature is elevated from RT to a high temperature (1600-1800°C) for less than 1 min. Using aluminum (Al)-implanted silicon carbide (SiC) samples, the performance of the HS-RTA equipment is evaluated. For Al-implanted samples annealed at 1700°C, the sheet resistance distribution on the 2-in.-φ susceptor is 8.0%.
AB - Rapid thermal annealing (RTA) on areas with diameters as large as 2 in. at high temperatures using hybrid super-RTA (HSRTA) equipment is performed in this study. The HS-RTA equipment consists of an infrared annealing unit and an RF induction annealing unit for uniform annealing over a 2-in.-φ susceptor. As a result of annealing using the HS-RTA equipment, temperature is elevated from RT to a high temperature (1600-1800°C) for less than 1 min. Using aluminum (Al)-implanted silicon carbide (SiC) samples, the performance of the HS-RTA equipment is evaluated. For Al-implanted samples annealed at 1700°C, the sheet resistance distribution on the 2-in.-φ susceptor is 8.0%.
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U2 - 10.1143/JJAP.46.5342
DO - 10.1143/JJAP.46.5342
M3 - Article
AN - SCOPUS:34547908886
VL - 46
SP - 5342
EP - 5344
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - 8 A
ER -