Active control of melt convection of silicon by electromagnetic force under cusp-shaped magnetic fields

Koichi Kakimoto, Akimasa Tashiro, Hideo Ishii, Takashige Shinozaki

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

Three-dimensional time-dependent flow of silicon melt in an electromagnetic Czochralski system was numerically investigated. Four different positions of electrodes were taken into account to investigate the mechanism of heat and oxygen transfer in the melt under cusp-shaped magnetic fields. The results showed that the position of electrode plays an important role to control heat and oxygen transfer in silicon melt.

Original languageEnglish
Pages (from-to)341-345
Number of pages5
JournalMaterials Science in Semiconductor Processing
Volume5
Issue number4-5 SPEC.
DOIs
Publication statusPublished - Dec 1 2002

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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