Adsorption Species of Transition Metal Ions on Silicon Wafer in SC-1 Solution

Yoshihiro Mori, Kenichi Uemura, Kengo Shimanoe

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Abstract

Adsorption of transition metal ions such as Fe(III), Ni(II), and Zn(II) on silicon wafers in ammoniac hydrogen peroxide solution (SC-1 solution) has been studied. It was found by comparing the experimental results with the equilibrium calculations that the main adsorption species is the dissolved neutral hydroxide complex. This was supported by the calculated free energy change of adsorption of hydroxide complexes.

Original languageEnglish
Pages (from-to)3104-3109
Number of pages6
JournalJournal of the Electrochemical Society
Volume142
Issue number9
DOIs
Publication statusPublished - Jan 1 1995
Externally publishedYes

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All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Renewable Energy, Sustainability and the Environment
  • Surfaces, Coatings and Films
  • Electrochemistry
  • Materials Chemistry

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