Adsorption Species of Transition Metal Ions on Silicon Wafer in SC-1 Solution

Yoshihiro Mori; Kenichi Uemura; Kengo Shimanoe

doi:10.1149/1.2048696

Adsorption Species of Transition Metal Ions on Silicon Wafer in SC-1 Solution

Yoshihiro Mori, Kenichi Uemura, Kengo Shimanoe

Research output: Contribution to journal › Article › peer-review

51 Citations (Scopus)

Abstract

Adsorption of transition metal ions such as Fe(III), Ni(II), and Zn(II) on silicon wafers in ammoniac hydrogen peroxide solution (SC-1 solution) has been studied. It was found by comparing the experimental results with the equilibrium calculations that the main adsorption species is the dissolved neutral hydroxide complex. This was supported by the calculated free energy change of adsorption of hydroxide complexes.

Original language	English
Pages (from-to)	3104-3109
Number of pages	6
Journal	Journal of the Electrochemical Society
Volume	142
Issue number	9
DOIs	https://doi.org/10.1149/1.2048696
Publication status	Published - 1995
Externally published	Yes

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Renewable Energy, Sustainability and the Environment
Surfaces, Coatings and Films
Electrochemistry
Materials Chemistry

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1149/1.2048696

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abstract = "Adsorption of transition metal ions such as Fe(III), Ni(II), and Zn(II) on silicon wafers in ammoniac hydrogen peroxide solution (SC-1 solution) has been studied. It was found by comparing the experimental results with the equilibrium calculations that the main adsorption species is the dissolved neutral hydroxide complex. This was supported by the calculated free energy change of adsorption of hydroxide complexes.",

author = "Yoshihiro Mori and Kenichi Uemura and Kengo Shimanoe",

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AU - Mori, Yoshihiro

AU - Uemura, Kenichi

AU - Shimanoe, Kengo

PY - 1995

Y1 - 1995

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AB - Adsorption of transition metal ions such as Fe(III), Ni(II), and Zn(II) on silicon wafers in ammoniac hydrogen peroxide solution (SC-1 solution) has been studied. It was found by comparing the experimental results with the equilibrium calculations that the main adsorption species is the dissolved neutral hydroxide complex. This was supported by the calculated free energy change of adsorption of hydroxide complexes.

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DO - 10.1149/1.2048696

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AN - SCOPUS:0029375881

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JO - Journal of the Electrochemical Society

JF - Journal of the Electrochemical Society

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ER -

Adsorption Species of Transition Metal Ions on Silicon Wafer in SC-1 Solution

Abstract

All Science Journal Classification (ASJC) codes

UN SDGs

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