Advanced process control of mask dry-etching using RF sensor

Hitoshi Handa, Satoshi Yamauchi, Koji Hosono, Hiroshi Maruyama, Daisuke Nakamura, Toshifumi Yokoyama, Akihiko Naito

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Advanced process control (APC) of photomask dry-etching has been studied for strict mean control of both CD and phase angle of phase shift masks (PSMs). Equations to correlate process information with actual etching results have been developed for this purpose. It is showed that plasma reactance measured with RF sensor has noticeable correlation with Cr etching bias, which is affected by Cr load and condition of etching chamber. Simulation of etching bias based on plasma reactance shows the good agreement with the trend of actual etching results. Expectation of process capability index (Cpk) for mean-to-target (MTT) within 5.2nm is about 1.27, corresponding to CD yield more than 99.9%. In case of MoSi based PSMs, monitoring the sensor outputs is also useful to simulate the etching rate of phase shifter. One simple relationship can be also derived as the case of Cr etching bias. Expected phase error is within 1.5degree in almost cases. In actual photomask fabrication, maintenance of the equation for APC is a critical issue to guarantee the high process yield for a long period. It is showed that trend of the plasma reactance gives the meaningful information effective in automatic maintenance of the equations. As a conclusion, it is proved that our APC method is one of the answers to give the highest MTT yield for both CD and phase angle.

Original languageEnglish
Title of host publicationPhotomask and Next-Generation Lithography Mask Technology XIII
DOIs
Publication statusPublished - Sep 4 2006
EventPhotomask and Next-Generation Lithography Mask Technology XIII - Yokohama, Japan
Duration: Apr 18 2006Apr 20 2006

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume6283 I
ISSN (Print)0277-786X

Other

OtherPhotomask and Next-Generation Lithography Mask Technology XIII
CountryJapan
CityYokohama
Period4/18/064/20/06

Fingerprint

Dry etching
Etching
Process Control
Mask
Process control
Masks
masks
etching
Sensor
sensors
Sensors
reactance
phase shift
Photomasks
Photomask
Plasma
photomasks
Plasmas
Phase shift
Phase Shift

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Handa, H., Yamauchi, S., Hosono, K., Maruyama, H., Nakamura, D., Yokoyama, T., & Naito, A. (2006). Advanced process control of mask dry-etching using RF sensor. In Photomask and Next-Generation Lithography Mask Technology XIII [62830D] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6283 I). https://doi.org/10.1117/12.681740

Advanced process control of mask dry-etching using RF sensor. / Handa, Hitoshi; Yamauchi, Satoshi; Hosono, Koji; Maruyama, Hiroshi; Nakamura, Daisuke; Yokoyama, Toshifumi; Naito, Akihiko.

Photomask and Next-Generation Lithography Mask Technology XIII. 2006. 62830D (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6283 I).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Handa, H, Yamauchi, S, Hosono, K, Maruyama, H, Nakamura, D, Yokoyama, T & Naito, A 2006, Advanced process control of mask dry-etching using RF sensor. in Photomask and Next-Generation Lithography Mask Technology XIII., 62830D, Proceedings of SPIE - The International Society for Optical Engineering, vol. 6283 I, Photomask and Next-Generation Lithography Mask Technology XIII, Yokohama, Japan, 4/18/06. https://doi.org/10.1117/12.681740
Handa H, Yamauchi S, Hosono K, Maruyama H, Nakamura D, Yokoyama T et al. Advanced process control of mask dry-etching using RF sensor. In Photomask and Next-Generation Lithography Mask Technology XIII. 2006. 62830D. (Proceedings of SPIE - The International Society for Optical Engineering). https://doi.org/10.1117/12.681740
Handa, Hitoshi ; Yamauchi, Satoshi ; Hosono, Koji ; Maruyama, Hiroshi ; Nakamura, Daisuke ; Yokoyama, Toshifumi ; Naito, Akihiko. / Advanced process control of mask dry-etching using RF sensor. Photomask and Next-Generation Lithography Mask Technology XIII. 2006. (Proceedings of SPIE - The International Society for Optical Engineering).
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