ガラス上におけるSiGe薄膜のアルミニウム誘起結晶化とその成長メカニズム

Translated title of the contribution: Al-Induced Crystallization of SiGe thin-films on glass and its growth mechanism

川畑 直之, 黒澤 昌志, 佐道 泰造, 宮尾 正信

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Physics & Astronomy