Amorphization induced by low-energy ion irradiation in silicon

Dong Ju Bai, Tomohiro Kawase, Akiyoshi Baba, Atsushi Kenjo, Taizoh Sadoh, Hiroshi Nakashima, Hiroshi Mori, Toshio Tsurushima

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Fingerprint

Dive into the research topics of 'Amorphization induced by low-energy ion irradiation in silicon'. Together they form a unique fingerprint.

Engineering & Materials Science