An accelerometer incorporating a laser microencoder for a wide measurable range

Renshi Sawada, E. Higurashi, T. Ito, I. Ishikawa

Research output: Contribution to journalArticle

14 Citations (Scopus)

Abstract

A small, highly accurate accelerometer that can measure a wide range of accelerations has been developed. The accelerometer incorporates an optical linear microencoder that measures displacement relative to a long, linear grating scale attached to a movable seismic mass with a restoring force. As a result, there is virtually no limit on the measurable range. A wire-cut two-parallel-plate cantilever and a silicon stage suspended by a monolithically integrated spring have been investigated as seismic masses. The accelerometer developed has a high design freedom in terms of both resolution and measurement range. By incorporating a microencoder, we achieved a resolution of 6.4 μg for a range of 0-1.8 g with the parallel two-plate cantilever, and 0.45 mg for a range of 0-1 g with the Si stage. If cut-filtering at more than 2 kHz is used, the resolution is improved further by one order of magnitude for both types of seismic mass.

Original languageEnglish
Pages (from-to)161-167
Number of pages7
JournalSensors and Actuators, A: Physical
Volume136
Issue number1
DOIs
Publication statusPublished - May 1 2007

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accelerometers
Accelerometers
Lasers
cantilever plates
lasers
rangefinding
Silicon
parallel plates
wire
Wire
gratings
silicon

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

Cite this

An accelerometer incorporating a laser microencoder for a wide measurable range. / Sawada, Renshi; Higurashi, E.; Ito, T.; Ishikawa, I.

In: Sensors and Actuators, A: Physical, Vol. 136, No. 1, 01.05.2007, p. 161-167.

Research output: Contribution to journalArticle

Sawada, Renshi ; Higurashi, E. ; Ito, T. ; Ishikawa, I. / An accelerometer incorporating a laser microencoder for a wide measurable range. In: Sensors and Actuators, A: Physical. 2007 ; Vol. 136, No. 1. pp. 161-167.
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