An adaptive optical system for sub-10nm hard X-ray focusing

H. Mimura, Takashi Kimura, H. Yokoyama, H. Yumoto, S. Matsuyama, K. Tamasaku, Y. Koumura, M. Yabashi, T. Ishikawa, K. Yamauchi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

Abstract

In the hard X-ray region, to obtain the theoretical resolution or diffraction limited focusing size in an imaging optical system, both ultraprecise optics and highly accurate alignment are necessary. An adaptive optical system is used for the compensation of aberrations in various optical systems, such as optical microscopes and space telescopes. In situ wavefront control of hard X-rays is also effective for realizing ideal performance. The aim of this paper is to develop an adaptive optical system for sub-10nm hard X-ray focusing. The adaptive optical system performs the wavefront measurement using a phase retrieval algorithm and wavefront control using grazing incidence deformable mirrors. Several results of experiments using the developed system are reported.

Original languageEnglish
Title of host publicationAdaptive X-Ray Optics
DOIs
Publication statusPublished - Nov 25 2010
Externally publishedYes
EventAdaptive X-Ray Optics - San Diego, CA, United States
Duration: Aug 3 2010Aug 5 2010

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume7803
ISSN (Print)0277-786X

Other

OtherAdaptive X-Ray Optics
CountryUnited States
CitySan Diego, CA
Period8/3/108/5/10

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Mimura, H., Kimura, T., Yokoyama, H., Yumoto, H., Matsuyama, S., Tamasaku, K., Koumura, Y., Yabashi, M., Ishikawa, T., & Yamauchi, K. (2010). An adaptive optical system for sub-10nm hard X-ray focusing. In Adaptive X-Ray Optics [780304] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 7803). https://doi.org/10.1117/12.862291