TY - JOUR
T1 - An analysis of temperature distribution near the melt-crystal interface in silicon Czochralski growth with a transverse magnetic field
AU - Liu, Lijun
AU - Nakano, Satoshi
AU - Kakimoto, Koichi
N1 - Funding Information:
This work was partly supported by a Grant-in-Aid for Scientific Research (B) 14350010 and a Grant-in-Aid for the creation of innovation through business–academy–public sector cooperation from the Japanese Ministry of Education, Science, Sports and Culture.
PY - 2005/8/15
Y1 - 2005/8/15
N2 - A three-dimensional (3D) global analysis was carried out numerically for a small silicon Czochralski furnace in a transverse magnetic field to clarify temperature distribution near a melt-crystal interface. The melt-crystal interface shape and the axial temperature gradients in solid and liquid near the interface were calculated as functions of the magnetic field intensity and the pulling rate of a crystal. It was found that the axial temperature gradient in the crystal increases with increase in the crystal-pulling rate and that in the melt decreases near the interface. With increase in intensity of the magnetic field, the axial temperature gradients in both crystal and melt increase. The influence of melt convection becomes smaller with increase in either the magnetic field intensity or the crystal-pulling rate. The melt-crystal interface moves upward with increase in either the ratio between crystal-pulling rate and temperature gradient in the crystal or the intensity of the applied magnetic field.
AB - A three-dimensional (3D) global analysis was carried out numerically for a small silicon Czochralski furnace in a transverse magnetic field to clarify temperature distribution near a melt-crystal interface. The melt-crystal interface shape and the axial temperature gradients in solid and liquid near the interface were calculated as functions of the magnetic field intensity and the pulling rate of a crystal. It was found that the axial temperature gradient in the crystal increases with increase in the crystal-pulling rate and that in the melt decreases near the interface. With increase in intensity of the magnetic field, the axial temperature gradients in both crystal and melt increase. The influence of melt convection becomes smaller with increase in either the magnetic field intensity or the crystal-pulling rate. The melt-crystal interface moves upward with increase in either the ratio between crystal-pulling rate and temperature gradient in the crystal or the intensity of the applied magnetic field.
UR - http://www.scopus.com/inward/record.url?scp=22744431615&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=22744431615&partnerID=8YFLogxK
U2 - 10.1016/j.jcrysgro.2005.05.002
DO - 10.1016/j.jcrysgro.2005.05.002
M3 - Article
AN - SCOPUS:22744431615
SN - 0022-0248
VL - 282
SP - 49
EP - 59
JO - Journal of Crystal Growth
JF - Journal of Crystal Growth
IS - 1-2
ER -