Abstract
A hybrid micro-displacement sensor based on a Fizeau-type interferometer has been developed. The proposed sensor structure includes a polyimide waveguide, a distributed feedback laser diode, a two-segment edge-illuminated refracting-facet photodiode, a polarization beam splitter plate, a quarter-wave plate, and a beam splitter plate all on a silicon substrate (2 mm × 3 mm). The sensor was fabricated by means of a passive alignment technique using alignment marks with an alignment accuracy of ±1 μm. By using this sensor and an electronic feedback system, the position of a mirror actuated by a piezoelectric transducer can be servo-controlled. Nanometer-scale positioning of the mirror was accomplished with good stability against creep phenomena of the piezoelectric transducer.
| Original language | English |
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| Title of host publication | Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) |
| Pages | 348-351 |
| Number of pages | 4 |
| Publication status | Published - 2002 |
| Externally published | Yes |
| Event | 15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002 - Las Vegas, NV, United States Duration: Jan 20 2002 → Jan 24 2002 |
Other
| Other | 15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002 |
|---|---|
| Country/Territory | United States |
| City | Las Vegas, NV |
| Period | 1/20/02 → 1/24/02 |
All Science Journal Classification (ASJC) codes
- Control and Systems Engineering
- Electrical and Electronic Engineering
- Mechanical Engineering