An integrated fizeau-type interferometric displacement sensor for a feedback-controlled actuation system

E. Higurashi, Renshi Sawada

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

A hybrid micro-displacement sensor based on a Fizeau-type interferometer has been developed. The proposed sensor structure includes a polyimide waveguide, a distributed feedback laser diode, a two-segment edge-illuminated refracting-facet photodiode, a polarization beam splitter plate, a quarter-wave plate, and a beam splitter plate all on a silicon substrate (2 mm × 3 mm). The sensor was fabricated by means of a passive alignment technique using alignment marks with an alignment accuracy of ±1 μm. By using this sensor and an electronic feedback system, the position of a mirror actuated by a piezoelectric transducer can be servo-controlled. Nanometer-scale positioning of the mirror was accomplished with good stability against creep phenomena of the piezoelectric transducer.

Original languageEnglish
Title of host publicationProceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
Pages348-351
Number of pages4
Publication statusPublished - 2002
Externally publishedYes
Event15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002 - Las Vegas, NV, United States
Duration: Jan 20 2002Jan 24 2002

Other

Other15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002
CountryUnited States
CityLas Vegas, NV
Period1/20/021/24/02

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Mechanical Engineering

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