An optical fiber probe for 3-D micro metrology

Hiroshi Murakami, Akio Katsuki, Hiromichi Onikura, Takao Sajima, Norio Kawagoishi, Eiji Kondo, Tomohiro Honda

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper presents a system of 3-D micro structure measurement that uses an optical fiber probe of 5 μm in diameter. The probe is deflected when it comes into contact with a measured surface, and this deflection is measured optically. In this research, we optimize design parameters of optical system using ray tracing, and a prototype of the measuring system is fabricated on trial to verify the simulation results. Then, its measuring accuracies are examined by using the basic experimental apparatus. As a result, it is clarified that the resolution of the fiber probe is better than 10 nm. Also, the utility of this system is confirmed by measuring the shape of a 600 ?m diameter ruby sphere.

Original languageEnglish
Title of host publicationAdvances in Precision Engineering
PublisherTrans Tech Publications Ltd
Pages524-528
Number of pages5
ISBN (Print)9780878492565
DOIs
Publication statusPublished - 2010

Publication series

NameKey Engineering Materials
Volume447 448
ISSN (Print)1013-9826
ISSN (Electronic)1662-9795

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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