An optical fiber probe for 3-D micro metrology

Hiroshi Murakami, Akio Katsuki, Hiromichi Onikura, Takao Sajima, Norio Kawagoishi, Eiji Kondo, Tomohiro Honda

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper presents a system of 3-D micro structure measurement that uses an optical fiber probe of 5 μm in diameter. The probe is deflected when it comes into contact with a measured surface, and this deflection is measured optically. In this research, we optimize design parameters of optical system using ray tracing, and a prototype of the measuring system is fabricated on trial to verify the simulation results. Then, its measuring accuracies are examined by using the basic experimental apparatus. As a result, it is clarified that the resolution of the fiber probe is better than 10 nm. Also, the utility of this system is confirmed by measuring the shape of a 600 ?m diameter ruby sphere.

Original languageEnglish
Title of host publicationAdvances in Precision Engineering
Pages524-528
Number of pages5
DOIs
Publication statusPublished - Dec 29 2010
EventICoPE2010 and 13th ICPE International Conference on Precision Engineering - , Singapore
Duration: Jul 28 2010Jul 30 2010

Publication series

NameKey Engineering Materials
Volume447 448
ISSN (Print)1013-9826

Other

OtherICoPE2010 and 13th ICPE International Conference on Precision Engineering
CountrySingapore
Period7/28/107/30/10

Fingerprint

Optical fibers
Ruby
Ray tracing
Optical systems
Microstructure
Fibers

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Murakami, H., Katsuki, A., Onikura, H., Sajima, T., Kawagoishi, N., Kondo, E., & Honda, T. (2010). An optical fiber probe for 3-D micro metrology. In Advances in Precision Engineering (pp. 524-528). (Key Engineering Materials; Vol. 447 448). https://doi.org/10.4028/www.scientific.net/KEM.447-448.524

An optical fiber probe for 3-D micro metrology. / Murakami, Hiroshi; Katsuki, Akio; Onikura, Hiromichi; Sajima, Takao; Kawagoishi, Norio; Kondo, Eiji; Honda, Tomohiro.

Advances in Precision Engineering. 2010. p. 524-528 (Key Engineering Materials; Vol. 447 448).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Murakami, H, Katsuki, A, Onikura, H, Sajima, T, Kawagoishi, N, Kondo, E & Honda, T 2010, An optical fiber probe for 3-D micro metrology. in Advances in Precision Engineering. Key Engineering Materials, vol. 447 448, pp. 524-528, ICoPE2010 and 13th ICPE International Conference on Precision Engineering, Singapore, 7/28/10. https://doi.org/10.4028/www.scientific.net/KEM.447-448.524
Murakami H, Katsuki A, Onikura H, Sajima T, Kawagoishi N, Kondo E et al. An optical fiber probe for 3-D micro metrology. In Advances in Precision Engineering. 2010. p. 524-528. (Key Engineering Materials). https://doi.org/10.4028/www.scientific.net/KEM.447-448.524
Murakami, Hiroshi ; Katsuki, Akio ; Onikura, Hiromichi ; Sajima, Takao ; Kawagoishi, Norio ; Kondo, Eiji ; Honda, Tomohiro. / An optical fiber probe for 3-D micro metrology. Advances in Precision Engineering. 2010. pp. 524-528 (Key Engineering Materials).
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