Analysis and evaluation of surface force effects in vibrating fiber probing system for 3-D micro structure measurements

Hiroshi Murakami, Akio Katsuki, Takao Sajima

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper presents a measurement system for 3-D microstructures that uses an optical fiber probe equipped with a piezo element that causes the probe to vibrate. The optical fiber probe consists of a stylus shaft with a diameter of 3 μm and a glass ball with a diameter of 5 μm attached to the tip. The stylus is set such that it moves in a circular motion in a plane. The measurement principle involves the monitoring of the vibrational amplitude of the stylus that is required to prevent adhesion of the stylus tip onto the measured surface caused by the surface force, and this amplitude is measured optically. In this study, the stylus characteristics are examined. The effects of the relative humidity and the surface roughness on the surface force are then evaluated. As a result, it is shown that the surface force increases significantly when the relative humidity is greater than 40%, and there is no adhesion of the stylus tip to the measured surface due to the surface force when the stylus vibrational amplitude is greater than 0.5 μm. In addition, there is no surface roughness effect on the surface force between 0.2 μm and 0.8 μm.

Original languageEnglish
Title of host publicationEmerging Technology in Precision Engineering XIV
Pages907-912
Number of pages6
DOIs
Publication statusPublished - Dec 11 2012
Event14th International Conference on Precision Engineering, ICPE 2012 - Hyogo, Japan
Duration: Nov 8 2012Nov 10 2012

Publication series

NameKey Engineering Materials
Volume523-524
ISSN (Print)1013-9826

Other

Other14th International Conference on Precision Engineering, ICPE 2012
CountryJapan
CityHyogo
Period11/8/1211/10/12

Fingerprint

Microstructure
Fibers
Optical fibers
Atmospheric humidity
Adhesion
Surface roughness
Glass
Monitoring

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Murakami, H., Katsuki, A., & Sajima, T. (2012). Analysis and evaluation of surface force effects in vibrating fiber probing system for 3-D micro structure measurements. In Emerging Technology in Precision Engineering XIV (pp. 907-912). (Key Engineering Materials; Vol. 523-524). https://doi.org/10.4028/www.scientific.net/KEM.523-524.907

Analysis and evaluation of surface force effects in vibrating fiber probing system for 3-D micro structure measurements. / Murakami, Hiroshi; Katsuki, Akio; Sajima, Takao.

Emerging Technology in Precision Engineering XIV. 2012. p. 907-912 (Key Engineering Materials; Vol. 523-524).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Murakami, H, Katsuki, A & Sajima, T 2012, Analysis and evaluation of surface force effects in vibrating fiber probing system for 3-D micro structure measurements. in Emerging Technology in Precision Engineering XIV. Key Engineering Materials, vol. 523-524, pp. 907-912, 14th International Conference on Precision Engineering, ICPE 2012, Hyogo, Japan, 11/8/12. https://doi.org/10.4028/www.scientific.net/KEM.523-524.907
Murakami H, Katsuki A, Sajima T. Analysis and evaluation of surface force effects in vibrating fiber probing system for 3-D micro structure measurements. In Emerging Technology in Precision Engineering XIV. 2012. p. 907-912. (Key Engineering Materials). https://doi.org/10.4028/www.scientific.net/KEM.523-524.907
Murakami, Hiroshi ; Katsuki, Akio ; Sajima, Takao. / Analysis and evaluation of surface force effects in vibrating fiber probing system for 3-D micro structure measurements. Emerging Technology in Precision Engineering XIV. 2012. pp. 907-912 (Key Engineering Materials).
@inproceedings{6f16d9fa866b4232aea86b467ad967dc,
title = "Analysis and evaluation of surface force effects in vibrating fiber probing system for 3-D micro structure measurements",
abstract = "This paper presents a measurement system for 3-D microstructures that uses an optical fiber probe equipped with a piezo element that causes the probe to vibrate. The optical fiber probe consists of a stylus shaft with a diameter of 3 μm and a glass ball with a diameter of 5 μm attached to the tip. The stylus is set such that it moves in a circular motion in a plane. The measurement principle involves the monitoring of the vibrational amplitude of the stylus that is required to prevent adhesion of the stylus tip onto the measured surface caused by the surface force, and this amplitude is measured optically. In this study, the stylus characteristics are examined. The effects of the relative humidity and the surface roughness on the surface force are then evaluated. As a result, it is shown that the surface force increases significantly when the relative humidity is greater than 40{\%}, and there is no adhesion of the stylus tip to the measured surface due to the surface force when the stylus vibrational amplitude is greater than 0.5 μm. In addition, there is no surface roughness effect on the surface force between 0.2 μm and 0.8 μm.",
author = "Hiroshi Murakami and Akio Katsuki and Takao Sajima",
year = "2012",
month = "12",
day = "11",
doi = "10.4028/www.scientific.net/KEM.523-524.907",
language = "English",
isbn = "9783037855096",
series = "Key Engineering Materials",
pages = "907--912",
booktitle = "Emerging Technology in Precision Engineering XIV",

}

TY - GEN

T1 - Analysis and evaluation of surface force effects in vibrating fiber probing system for 3-D micro structure measurements

AU - Murakami, Hiroshi

AU - Katsuki, Akio

AU - Sajima, Takao

PY - 2012/12/11

Y1 - 2012/12/11

N2 - This paper presents a measurement system for 3-D microstructures that uses an optical fiber probe equipped with a piezo element that causes the probe to vibrate. The optical fiber probe consists of a stylus shaft with a diameter of 3 μm and a glass ball with a diameter of 5 μm attached to the tip. The stylus is set such that it moves in a circular motion in a plane. The measurement principle involves the monitoring of the vibrational amplitude of the stylus that is required to prevent adhesion of the stylus tip onto the measured surface caused by the surface force, and this amplitude is measured optically. In this study, the stylus characteristics are examined. The effects of the relative humidity and the surface roughness on the surface force are then evaluated. As a result, it is shown that the surface force increases significantly when the relative humidity is greater than 40%, and there is no adhesion of the stylus tip to the measured surface due to the surface force when the stylus vibrational amplitude is greater than 0.5 μm. In addition, there is no surface roughness effect on the surface force between 0.2 μm and 0.8 μm.

AB - This paper presents a measurement system for 3-D microstructures that uses an optical fiber probe equipped with a piezo element that causes the probe to vibrate. The optical fiber probe consists of a stylus shaft with a diameter of 3 μm and a glass ball with a diameter of 5 μm attached to the tip. The stylus is set such that it moves in a circular motion in a plane. The measurement principle involves the monitoring of the vibrational amplitude of the stylus that is required to prevent adhesion of the stylus tip onto the measured surface caused by the surface force, and this amplitude is measured optically. In this study, the stylus characteristics are examined. The effects of the relative humidity and the surface roughness on the surface force are then evaluated. As a result, it is shown that the surface force increases significantly when the relative humidity is greater than 40%, and there is no adhesion of the stylus tip to the measured surface due to the surface force when the stylus vibrational amplitude is greater than 0.5 μm. In addition, there is no surface roughness effect on the surface force between 0.2 μm and 0.8 μm.

UR - http://www.scopus.com/inward/record.url?scp=84870599934&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84870599934&partnerID=8YFLogxK

U2 - 10.4028/www.scientific.net/KEM.523-524.907

DO - 10.4028/www.scientific.net/KEM.523-524.907

M3 - Conference contribution

SN - 9783037855096

T3 - Key Engineering Materials

SP - 907

EP - 912

BT - Emerging Technology in Precision Engineering XIV

ER -