Analysis and fabrication of ampere-force actuated bistable curved beam

Ivransa Zuhdi Pane, Tanemasa Asano

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)

Abstract

An actuation scheme of bistable curved beam by Ampere force was proposed. Analysis showed that the actuation force distribution on the curved beam by this current-based method can improve the switching force to snap the curved beam lower than the one of the conventional actuation scheme by capacitive electrostatic force. To observe the snap action, vertical snap type SiO 2 curved beams were fabricated with Cr deposited on to provide current conductivities. The Cr layer was considered to affect the original bistability characteristics of SiO2 curved beam, which in turn alter the switching force from the theoretical prediction.

Original languageEnglish
Pages (from-to)06FK081-06FK084
JournalJapanese journal of applied physics
Volume48
Issue number6 PART 2
DOIs
Publication statusPublished - Jun 1 2009

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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