Analysis of ion implanted diamond-like-carbon films using laser-induced transient reflecting grating technique

Q. Shen, A. Harata, T. Sawada

Research output: Contribution to journalConference article

Abstract

Laser-induced transient reflecting grating (TRG) technique was applied to measure both nitrogen-ion-implanted and nonimplanted thin-film coatings (thickness, 40nm) of diamond-like-carbon (DLC). Different TRG responses corresponding to the different samples with a variety of nitrogen-ion implantation doses were observed and the hypersonic surface acoustic wave velocities were obtained with a variety of wavelengths. A phenomenon was observed that the SAW velocity of the implanted DLC coating with higher dose became larger than that of the nonimplanted sample.

Original languageEnglish
Pages (from-to)C7-233-236
JournalJournal De Physique
Volume4
Issue number7
Publication statusPublished - Jul 1 1994
Externally publishedYes
EventProceedings of the 8th International Topical Meeting on Photoacoustic and Photothermal Phenomena - Guadeloupe, Fr
Duration: Jan 22 1994Jan 25 1994

Fingerprint

Diamond like carbon films
nitrogen ions
Diamonds
diamonds
gratings
Nitrogen
coatings
Coatings
dosage
Carbon
Lasers
carbon
hypersonics
Hypersonic aerodynamics
Ions
Acoustic wave velocity
Ion implantation
Surface waves
Dosimetry
lasers

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

Cite this

Analysis of ion implanted diamond-like-carbon films using laser-induced transient reflecting grating technique. / Shen, Q.; Harata, A.; Sawada, T.

In: Journal De Physique, Vol. 4, No. 7, 01.07.1994, p. C7-233-236.

Research output: Contribution to journalConference article

@article{9eb32d92f90542e7900b2dce93447db1,
title = "Analysis of ion implanted diamond-like-carbon films using laser-induced transient reflecting grating technique",
abstract = "Laser-induced transient reflecting grating (TRG) technique was applied to measure both nitrogen-ion-implanted and nonimplanted thin-film coatings (thickness, 40nm) of diamond-like-carbon (DLC). Different TRG responses corresponding to the different samples with a variety of nitrogen-ion implantation doses were observed and the hypersonic surface acoustic wave velocities were obtained with a variety of wavelengths. A phenomenon was observed that the SAW velocity of the implanted DLC coating with higher dose became larger than that of the nonimplanted sample.",
author = "Q. Shen and A. Harata and T. Sawada",
year = "1994",
month = "7",
day = "1",
language = "English",
volume = "4",
pages = "C7--233--236",
journal = "Journal De Physique",
issn = "0302-0738",
publisher = "Societe Francaise De Physique",
number = "7",

}

TY - JOUR

T1 - Analysis of ion implanted diamond-like-carbon films using laser-induced transient reflecting grating technique

AU - Shen, Q.

AU - Harata, A.

AU - Sawada, T.

PY - 1994/7/1

Y1 - 1994/7/1

N2 - Laser-induced transient reflecting grating (TRG) technique was applied to measure both nitrogen-ion-implanted and nonimplanted thin-film coatings (thickness, 40nm) of diamond-like-carbon (DLC). Different TRG responses corresponding to the different samples with a variety of nitrogen-ion implantation doses were observed and the hypersonic surface acoustic wave velocities were obtained with a variety of wavelengths. A phenomenon was observed that the SAW velocity of the implanted DLC coating with higher dose became larger than that of the nonimplanted sample.

AB - Laser-induced transient reflecting grating (TRG) technique was applied to measure both nitrogen-ion-implanted and nonimplanted thin-film coatings (thickness, 40nm) of diamond-like-carbon (DLC). Different TRG responses corresponding to the different samples with a variety of nitrogen-ion implantation doses were observed and the hypersonic surface acoustic wave velocities were obtained with a variety of wavelengths. A phenomenon was observed that the SAW velocity of the implanted DLC coating with higher dose became larger than that of the nonimplanted sample.

UR - http://www.scopus.com/inward/record.url?scp=0028477442&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0028477442&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:0028477442

VL - 4

SP - C7-233-236

JO - Journal De Physique

JF - Journal De Physique

SN - 0302-0738

IS - 7

ER -