Analysis of the thermal and acoustic properties of ion-implanted diamondlike carbon films using the transient reflecting grating technique

Qing Shen, Akira Harata, Tsuguo Sawada

Research output: Contribution to journalArticle

19 Citations (Scopus)

Abstract

The transient reflecting grating (TRG) technique was applied to evaluate both nitrogen-ion-implanted and nonimplanted thin-film coatings (thickness: 40 nm) of diamondlike carbon (DLC) on metallic multilayered substrates. Different TRG responses corresponding to the different nitrogen ion doses were observed. Hypersonic surface wave velocities as well as the thermal diffusivities were obtained with a variety of grating spacings. Effective elastic moduli (Young's moduli) for the DLC coatings were given by using a theoretical treatment with a model. Nitrogen ion implantation hardened the DLC coating.

Original languageEnglish
Pages (from-to)1488-1491
Number of pages4
JournalJournal of Applied Physics
Volume77
Issue number4
DOIs
Publication statusPublished - Dec 1 1995
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

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