Analysis of the thermal and acoustic properties of ion-implanted diamondlike carbon films using the transient reflecting grating technique

Qing Shen, Akira Harata, Tsuguo Sawada

Research output: Contribution to journalArticle

19 Citations (Scopus)

Abstract

The transient reflecting grating (TRG) technique was applied to evaluate both nitrogen-ion-implanted and nonimplanted thin-film coatings (thickness: 40 nm) of diamondlike carbon (DLC) on metallic multilayered substrates. Different TRG responses corresponding to the different nitrogen ion doses were observed. Hypersonic surface wave velocities as well as the thermal diffusivities were obtained with a variety of grating spacings. Effective elastic moduli (Young's moduli) for the DLC coatings were given by using a theoretical treatment with a model. Nitrogen ion implantation hardened the DLC coating.

Original languageEnglish
Pages (from-to)1488-1491
Number of pages4
JournalJournal of Applied Physics
Volume77
Issue number4
DOIs
Publication statusPublished - Dec 1 1995

Fingerprint

acoustic properties
nitrogen ions
thermodynamic properties
gratings
coatings
carbon
modulus of elasticity
ions
hypersonics
thermal diffusivity
surface waves
ion implantation
spacing
dosage
thin films

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

Cite this

Analysis of the thermal and acoustic properties of ion-implanted diamondlike carbon films using the transient reflecting grating technique. / Shen, Qing; Harata, Akira; Sawada, Tsuguo.

In: Journal of Applied Physics, Vol. 77, No. 4, 01.12.1995, p. 1488-1491.

Research output: Contribution to journalArticle

@article{ee22c7d5154a4e4291891ce31ff4c4e8,
title = "Analysis of the thermal and acoustic properties of ion-implanted diamondlike carbon films using the transient reflecting grating technique",
abstract = "The transient reflecting grating (TRG) technique was applied to evaluate both nitrogen-ion-implanted and nonimplanted thin-film coatings (thickness: 40 nm) of diamondlike carbon (DLC) on metallic multilayered substrates. Different TRG responses corresponding to the different nitrogen ion doses were observed. Hypersonic surface wave velocities as well as the thermal diffusivities were obtained with a variety of grating spacings. Effective elastic moduli (Young's moduli) for the DLC coatings were given by using a theoretical treatment with a model. Nitrogen ion implantation hardened the DLC coating.",
author = "Qing Shen and Akira Harata and Tsuguo Sawada",
year = "1995",
month = "12",
day = "1",
doi = "10.1063/1.358898",
language = "English",
volume = "77",
pages = "1488--1491",
journal = "Journal of Applied Physics",
issn = "0021-8979",
publisher = "American Institute of Physics Publising LLC",
number = "4",

}

TY - JOUR

T1 - Analysis of the thermal and acoustic properties of ion-implanted diamondlike carbon films using the transient reflecting grating technique

AU - Shen, Qing

AU - Harata, Akira

AU - Sawada, Tsuguo

PY - 1995/12/1

Y1 - 1995/12/1

N2 - The transient reflecting grating (TRG) technique was applied to evaluate both nitrogen-ion-implanted and nonimplanted thin-film coatings (thickness: 40 nm) of diamondlike carbon (DLC) on metallic multilayered substrates. Different TRG responses corresponding to the different nitrogen ion doses were observed. Hypersonic surface wave velocities as well as the thermal diffusivities were obtained with a variety of grating spacings. Effective elastic moduli (Young's moduli) for the DLC coatings were given by using a theoretical treatment with a model. Nitrogen ion implantation hardened the DLC coating.

AB - The transient reflecting grating (TRG) technique was applied to evaluate both nitrogen-ion-implanted and nonimplanted thin-film coatings (thickness: 40 nm) of diamondlike carbon (DLC) on metallic multilayered substrates. Different TRG responses corresponding to the different nitrogen ion doses were observed. Hypersonic surface wave velocities as well as the thermal diffusivities were obtained with a variety of grating spacings. Effective elastic moduli (Young's moduli) for the DLC coatings were given by using a theoretical treatment with a model. Nitrogen ion implantation hardened the DLC coating.

UR - http://www.scopus.com/inward/record.url?scp=0005810513&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0005810513&partnerID=8YFLogxK

U2 - 10.1063/1.358898

DO - 10.1063/1.358898

M3 - Article

AN - SCOPUS:0005810513

VL - 77

SP - 1488

EP - 1491

JO - Journal of Applied Physics

JF - Journal of Applied Physics

SN - 0021-8979

IS - 4

ER -