Abstract
To obtain higher efficiency and higher ozone concentration, the brand new double-discharge-type ozonizer was proposed. The double-discharge ozonizer has a metallic anode partly covered with the dielectric, which increases the discharge volume. Basic parameters such as discharge voltage and current waveforms and ozone concentration were investigated to characterize the double discharge. The discharge power and volume enhanced to 180% in comparison with the case of without dielectric, and the ozone concentration was increased from 300 to 750ppm and the generation yield was enhanced from 90 to 100g/kWh.
Original language | English |
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Pages (from-to) | 567-571 |
Number of pages | 5 |
Journal | Vacuum |
Volume | 73 |
Issue number | 3-4 |
DOIs | |
Publication status | Published - Apr 19 2004 |
Externally published | Yes |
Event | The 4th International Symposium on Applied Plasma Science - Kyoto, Japan Duration: Sep 1 2003 → Sep 5 2003 |
All Science Journal Classification (ASJC) codes
- Instrumentation
- Condensed Matter Physics
- Surfaces, Coatings and Films