Application of nano-imprint technology to grating scale for a rotary microencoder

Toshihiro Takeshita, Takuma Iwasaki, Eiji Higurashi, Tatsuya Miyazaki, Renshi Sawada

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Using nano-imprint technology we have developed a rotary diffraction grating scale, which is used for micro rotary encoding. The off-center error between the center of the trough-hole for a rotational axis and the center of the high-precision micro-pattern on the periphery of the scale is less than 3 μm because we are able to shape the through-hole and the grating pattern simultaneously. The use of nano-imprinting is epoch-making, in view of the traditionally poor centering precision of grating scale through-holes fabricated using the conventional photolithography coupled with machining of the through-hole.

Original languageEnglish
Title of host publicationOptical MEMS and Nanophotonics 2013, OMN 2013 - Proceedings
Pages117-118
Number of pages2
DOIs
Publication statusPublished - Dec 1 2013
Event2013 International Conference on Optical MEMS and Nanophotonics, OMN 2013 - Kanazawa, Japan
Duration: Aug 18 2013Aug 22 2013

Publication series

NameInternational Conference on Optical MEMS and Nanophotonics
ISSN (Print)2160-5033
ISSN (Electronic)2160-5041

Other

Other2013 International Conference on Optical MEMS and Nanophotonics, OMN 2013
CountryJapan
CityKanazawa
Period8/18/138/22/13

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All Science Journal Classification (ASJC) codes

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Takeshita, T., Iwasaki, T., Higurashi, E., Miyazaki, T., & Sawada, R. (2013). Application of nano-imprint technology to grating scale for a rotary microencoder. In Optical MEMS and Nanophotonics 2013, OMN 2013 - Proceedings (pp. 117-118). [6659087] (International Conference on Optical MEMS and Nanophotonics). https://doi.org/10.1109/OMN.2013.6659087