Application of nano-imprint technology to grating scale for a rotary microencoder

Toshihiro Takeshita, Takuma Iwasaki, Eiji Higurashi, Tatsuya Miyazaki, Renshi Sawada

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Using nano-imprint technology we have developed a rotary diffraction grating scale, which is used for micro rotary encoding. The off-center error between the center of the trough-hole for a rotational axis and the center of the high-precision micro-pattern on the periphery of the scale is less than 3 μm because we are able to shape the through-hole and the grating pattern simultaneously. The use of nano-imprinting is epoch-making, in view of the traditionally poor centering precision of grating scale through-holes fabricated using the conventional photolithography coupled with machining of the through-hole.

Original languageEnglish
Title of host publicationOptical MEMS and Nanophotonics 2013, OMN 2013 - Proceedings
Pages117-118
Number of pages2
DOIs
Publication statusPublished - 2013
Event2013 International Conference on Optical MEMS and Nanophotonics, OMN 2013 - Kanazawa, Japan
Duration: Aug 18 2013Aug 22 2013

Other

Other2013 International Conference on Optical MEMS and Nanophotonics, OMN 2013
CountryJapan
CityKanazawa
Period8/18/138/22/13

Fingerprint

Diffraction gratings
Photolithography
Nanotechnology
Machining

All Science Journal Classification (ASJC) codes

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Takeshita, T., Iwasaki, T., Higurashi, E., Miyazaki, T., & Sawada, R. (2013). Application of nano-imprint technology to grating scale for a rotary microencoder. In Optical MEMS and Nanophotonics 2013, OMN 2013 - Proceedings (pp. 117-118). [6659087] https://doi.org/10.1109/OMN.2013.6659087

Application of nano-imprint technology to grating scale for a rotary microencoder. / Takeshita, Toshihiro; Iwasaki, Takuma; Higurashi, Eiji; Miyazaki, Tatsuya; Sawada, Renshi.

Optical MEMS and Nanophotonics 2013, OMN 2013 - Proceedings. 2013. p. 117-118 6659087.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Takeshita, T, Iwasaki, T, Higurashi, E, Miyazaki, T & Sawada, R 2013, Application of nano-imprint technology to grating scale for a rotary microencoder. in Optical MEMS and Nanophotonics 2013, OMN 2013 - Proceedings., 6659087, pp. 117-118, 2013 International Conference on Optical MEMS and Nanophotonics, OMN 2013, Kanazawa, Japan, 8/18/13. https://doi.org/10.1109/OMN.2013.6659087
Takeshita T, Iwasaki T, Higurashi E, Miyazaki T, Sawada R. Application of nano-imprint technology to grating scale for a rotary microencoder. In Optical MEMS and Nanophotonics 2013, OMN 2013 - Proceedings. 2013. p. 117-118. 6659087 https://doi.org/10.1109/OMN.2013.6659087
Takeshita, Toshihiro ; Iwasaki, Takuma ; Higurashi, Eiji ; Miyazaki, Tatsuya ; Sawada, Renshi. / Application of nano-imprint technology to grating scale for a rotary microencoder. Optical MEMS and Nanophotonics 2013, OMN 2013 - Proceedings. 2013. pp. 117-118
@inproceedings{76607483320c424b9c9a3cce26e6ebb4,
title = "Application of nano-imprint technology to grating scale for a rotary microencoder",
abstract = "Using nano-imprint technology we have developed a rotary diffraction grating scale, which is used for micro rotary encoding. The off-center error between the center of the trough-hole for a rotational axis and the center of the high-precision micro-pattern on the periphery of the scale is less than 3 μm because we are able to shape the through-hole and the grating pattern simultaneously. The use of nano-imprinting is epoch-making, in view of the traditionally poor centering precision of grating scale through-holes fabricated using the conventional photolithography coupled with machining of the through-hole.",
author = "Toshihiro Takeshita and Takuma Iwasaki and Eiji Higurashi and Tatsuya Miyazaki and Renshi Sawada",
year = "2013",
doi = "10.1109/OMN.2013.6659087",
language = "English",
isbn = "9781479915125",
pages = "117--118",
booktitle = "Optical MEMS and Nanophotonics 2013, OMN 2013 - Proceedings",

}

TY - GEN

T1 - Application of nano-imprint technology to grating scale for a rotary microencoder

AU - Takeshita, Toshihiro

AU - Iwasaki, Takuma

AU - Higurashi, Eiji

AU - Miyazaki, Tatsuya

AU - Sawada, Renshi

PY - 2013

Y1 - 2013

N2 - Using nano-imprint technology we have developed a rotary diffraction grating scale, which is used for micro rotary encoding. The off-center error between the center of the trough-hole for a rotational axis and the center of the high-precision micro-pattern on the periphery of the scale is less than 3 μm because we are able to shape the through-hole and the grating pattern simultaneously. The use of nano-imprinting is epoch-making, in view of the traditionally poor centering precision of grating scale through-holes fabricated using the conventional photolithography coupled with machining of the through-hole.

AB - Using nano-imprint technology we have developed a rotary diffraction grating scale, which is used for micro rotary encoding. The off-center error between the center of the trough-hole for a rotational axis and the center of the high-precision micro-pattern on the periphery of the scale is less than 3 μm because we are able to shape the through-hole and the grating pattern simultaneously. The use of nano-imprinting is epoch-making, in view of the traditionally poor centering precision of grating scale through-holes fabricated using the conventional photolithography coupled with machining of the through-hole.

UR - http://www.scopus.com/inward/record.url?scp=84892143462&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84892143462&partnerID=8YFLogxK

U2 - 10.1109/OMN.2013.6659087

DO - 10.1109/OMN.2013.6659087

M3 - Conference contribution

SN - 9781479915125

SP - 117

EP - 118

BT - Optical MEMS and Nanophotonics 2013, OMN 2013 - Proceedings

ER -