Application of nano-imprint technology to grating scale for a rotary microencoder

Toshihiro Takeshita, Takuma Iwasaki, Eiji Higurashi, Tatsuya Miyazaki, Renshi Sawada

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    Using nano-imprint technology we have developed a rotary diffraction grating scale, which is used for micro rotary encoding. The off-center error between the center of the trough-hole for a rotational axis and the center of the high-precision micro-pattern on the periphery of the scale is less than 3 μm because we are able to shape the through-hole and the grating pattern simultaneously. The use of nano-imprinting is epoch-making, in view of the traditionally poor centering precision of grating scale through-holes fabricated using the conventional photolithography coupled with machining of the through-hole.

    Original languageEnglish
    Title of host publicationOptical MEMS and Nanophotonics 2013, OMN 2013 - Proceedings
    Pages117-118
    Number of pages2
    DOIs
    Publication statusPublished - Dec 1 2013
    Event2013 International Conference on Optical MEMS and Nanophotonics, OMN 2013 - Kanazawa, Japan
    Duration: Aug 18 2013Aug 22 2013

    Publication series

    NameInternational Conference on Optical MEMS and Nanophotonics
    ISSN (Print)2160-5033
    ISSN (Electronic)2160-5041

    Other

    Other2013 International Conference on Optical MEMS and Nanophotonics, OMN 2013
    CountryJapan
    CityKanazawa
    Period8/18/138/22/13

    All Science Journal Classification (ASJC) codes

    • Hardware and Architecture
    • Electrical and Electronic Engineering
    • Electronic, Optical and Magnetic Materials

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