Application of the dielectric barrier discharge to detect defects in a teflon coated metal surface

Kenji Ebihara, Takahiro Tanaka, Tomoaki Ikegami, Yukihiko Yamagata, Toru Matsunaga, Kazutaka Yamashita, Yoshifumi Oyama

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

In the semiconductor industry, flexible stainless steel tubes, the inside of which are coated with thick Teflon films, by the splay coating method, have been used to prevent their degradation and erosion by organic solvents. We have developed an inspection system to detect pinholes and cracks in the deposited Teflon films, and the dielectric barrier discharge (DBD) was employed to reduce residual substances and damages to the coated film in the tube. Conducting water contained in the cylinder-like glass pipe was used as a liquid electrode to apply a high voltage at any portion of the tube tested. A defective part with a pinhole was modelled by a point electrode in this experiment, because the uncoated defective part has a lower electric breakdown voltage. High frequency voltage (10 kHz) was applied between the point electrode and the liquid electrode. The level of the liquid electrode was varied to detect the occurrence of a microdischarge. It is found that the number of current pulses due to the microdischarge can be used to estimate the size and location of the defective uncoated point of the sample tube.

Original languageEnglish
Pages (from-to)2883-2886
Number of pages4
JournalJournal of Physics D: Applied Physics
Volume36
Issue number23
DOIs
Publication statusPublished - Dec 7 2003

Fingerprint

teflon (trademark)
Polytetrafluoroethylene
Polytetrafluoroethylenes
metal surfaces
Metals
Defects
Electrodes
electrodes
defects
tubes
pinholes
Electric breakdown
Liquids
liquids
Stainless Steel
Electric potential
electrical faults
Organic solvents
erosion
coating

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Acoustics and Ultrasonics
  • Surfaces, Coatings and Films

Cite this

Application of the dielectric barrier discharge to detect defects in a teflon coated metal surface. / Ebihara, Kenji; Tanaka, Takahiro; Ikegami, Tomoaki; Yamagata, Yukihiko; Matsunaga, Toru; Yamashita, Kazutaka; Oyama, Yoshifumi.

In: Journal of Physics D: Applied Physics, Vol. 36, No. 23, 07.12.2003, p. 2883-2886.

Research output: Contribution to journalArticle

Ebihara, Kenji ; Tanaka, Takahiro ; Ikegami, Tomoaki ; Yamagata, Yukihiko ; Matsunaga, Toru ; Yamashita, Kazutaka ; Oyama, Yoshifumi. / Application of the dielectric barrier discharge to detect defects in a teflon coated metal surface. In: Journal of Physics D: Applied Physics. 2003 ; Vol. 36, No. 23. pp. 2883-2886.
@article{979fddeefb774c3386ea028c64f47da5,
title = "Application of the dielectric barrier discharge to detect defects in a teflon coated metal surface",
abstract = "In the semiconductor industry, flexible stainless steel tubes, the inside of which are coated with thick Teflon films, by the splay coating method, have been used to prevent their degradation and erosion by organic solvents. We have developed an inspection system to detect pinholes and cracks in the deposited Teflon films, and the dielectric barrier discharge (DBD) was employed to reduce residual substances and damages to the coated film in the tube. Conducting water contained in the cylinder-like glass pipe was used as a liquid electrode to apply a high voltage at any portion of the tube tested. A defective part with a pinhole was modelled by a point electrode in this experiment, because the uncoated defective part has a lower electric breakdown voltage. High frequency voltage (10 kHz) was applied between the point electrode and the liquid electrode. The level of the liquid electrode was varied to detect the occurrence of a microdischarge. It is found that the number of current pulses due to the microdischarge can be used to estimate the size and location of the defective uncoated point of the sample tube.",
author = "Kenji Ebihara and Takahiro Tanaka and Tomoaki Ikegami and Yukihiko Yamagata and Toru Matsunaga and Kazutaka Yamashita and Yoshifumi Oyama",
year = "2003",
month = "12",
day = "7",
doi = "10.1088/0022-3727/36/23/003",
language = "English",
volume = "36",
pages = "2883--2886",
journal = "Journal Physics D: Applied Physics",
issn = "0022-3727",
publisher = "IOP Publishing Ltd.",
number = "23",

}

TY - JOUR

T1 - Application of the dielectric barrier discharge to detect defects in a teflon coated metal surface

AU - Ebihara, Kenji

AU - Tanaka, Takahiro

AU - Ikegami, Tomoaki

AU - Yamagata, Yukihiko

AU - Matsunaga, Toru

AU - Yamashita, Kazutaka

AU - Oyama, Yoshifumi

PY - 2003/12/7

Y1 - 2003/12/7

N2 - In the semiconductor industry, flexible stainless steel tubes, the inside of which are coated with thick Teflon films, by the splay coating method, have been used to prevent their degradation and erosion by organic solvents. We have developed an inspection system to detect pinholes and cracks in the deposited Teflon films, and the dielectric barrier discharge (DBD) was employed to reduce residual substances and damages to the coated film in the tube. Conducting water contained in the cylinder-like glass pipe was used as a liquid electrode to apply a high voltage at any portion of the tube tested. A defective part with a pinhole was modelled by a point electrode in this experiment, because the uncoated defective part has a lower electric breakdown voltage. High frequency voltage (10 kHz) was applied between the point electrode and the liquid electrode. The level of the liquid electrode was varied to detect the occurrence of a microdischarge. It is found that the number of current pulses due to the microdischarge can be used to estimate the size and location of the defective uncoated point of the sample tube.

AB - In the semiconductor industry, flexible stainless steel tubes, the inside of which are coated with thick Teflon films, by the splay coating method, have been used to prevent their degradation and erosion by organic solvents. We have developed an inspection system to detect pinholes and cracks in the deposited Teflon films, and the dielectric barrier discharge (DBD) was employed to reduce residual substances and damages to the coated film in the tube. Conducting water contained in the cylinder-like glass pipe was used as a liquid electrode to apply a high voltage at any portion of the tube tested. A defective part with a pinhole was modelled by a point electrode in this experiment, because the uncoated defective part has a lower electric breakdown voltage. High frequency voltage (10 kHz) was applied between the point electrode and the liquid electrode. The level of the liquid electrode was varied to detect the occurrence of a microdischarge. It is found that the number of current pulses due to the microdischarge can be used to estimate the size and location of the defective uncoated point of the sample tube.

UR - http://www.scopus.com/inward/record.url?scp=0346361815&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0346361815&partnerID=8YFLogxK

U2 - 10.1088/0022-3727/36/23/003

DO - 10.1088/0022-3727/36/23/003

M3 - Article

VL - 36

SP - 2883

EP - 2886

JO - Journal Physics D: Applied Physics

JF - Journal Physics D: Applied Physics

SN - 0022-3727

IS - 23

ER -