In the semiconductor industry, flexible stainless steel tubes, the inside of which are coated with thick Teflon films, by the splay coating method, have been used to prevent their degradation and erosion by organic solvents. We have developed an inspection system to detect pinholes and cracks in the deposited Teflon films, and the dielectric barrier discharge (DBD) was employed to reduce residual substances and damages to the coated film in the tube. Conducting water contained in the cylinder-like glass pipe was used as a liquid electrode to apply a high voltage at any portion of the tube tested. A defective part with a pinhole was modelled by a point electrode in this experiment, because the uncoated defective part has a lower electric breakdown voltage. High frequency voltage (10 kHz) was applied between the point electrode and the liquid electrode. The level of the liquid electrode was varied to detect the occurrence of a microdischarge. It is found that the number of current pulses due to the microdischarge can be used to estimate the size and location of the defective uncoated point of the sample tube.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Acoustics and Ultrasonics
- Surfaces, Coatings and Films