@inproceedings{9de39e0dcb0a4da0a545b586ff83acc2,
title = "Artifacts in the structural analysis of SAB-fabricated interfaces by using focused ion beam",
abstract = "Atomistic structure of interfaces fabricated by surface activated bonding (SAB) at room temperature can be modified under the irradiation of a focused ion beam for structural analysis, presumably due to the migration of atoms assisted by point defects that are introduced during the SAB process.",
author = "Yutaka Ohno and Hideto Yoshida and Naoto Kamiuchi and Ryotaro Aso and Seiji Takeda and Yasuo Shimizu and Naoki Ebisawa and Yasuyoshi Nagai and Jianbo Liang and Naoteru Shigekawa",
year = "2019",
month = may,
doi = "10.23919/LTB-3D.2019.8735379",
language = "English",
series = "Proceedings of 2019 6th International Workshop on Low Temperature Bonding for 3D Integration, LTB-3D 2019",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "Proceedings of 2019 6th International Workshop on Low Temperature Bonding for 3D Integration, LTB-3D 2019",
address = "United States",
note = "6th International Workshop on Low Temperature Bonding for 3D Integration, LTB-3D 2019 ; Conference date: 21-05-2019 Through 25-05-2019",
}