Atomic force microscope study of carbon thin films prepared by pulsed laser deposition

Tsuyoshi Yoshitake, Takashi Nishiyama, Hajime Aoki, Koji Suizu, Koji Takahashi, Kunihito Nagayama

Research output: Contribution to journalArticlepeer-review

45 Citations (Scopus)

Abstract

Amorphous carbon films and diamond like carbon films were grown by pulsed laser deposition (PLD) using different laser wavelengths (λ=193 nm, 532 nm, 1064 nm) and substrate temperatures (from room temperature to 500°C). The morphology of the film surface was observed using an atomic force microscope (AFM) and a scanning electron microscope (SEM). Mechanisms for film growth are explained qualitatively using the subplantation model. All films showed the occasional incorporation of spherical particles with a diameter of 1-10 μm ejected from the targets due to surface being melted.

Original languageEnglish
Pages (from-to)129-137
Number of pages9
JournalApplied Surface Science
Volume141
Issue number1-2
DOIs
Publication statusPublished - Mar 1999

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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