Atomic force microscope study of carbon thin films prepared by pulsed laser deposition

Tsuyoshi Yoshitake; Takashi Nishiyama; Hajime Aoki; Koji Suizu; Koji Takahashi; Kunihito Nagayama

doi:10.1016/S0169-4332(98)00601-1

Atomic force microscope study of carbon thin films prepared by pulsed laser deposition

Tsuyoshi Yoshitake, Takashi Nishiyama, Hajime Aoki, Koji Suizu, Koji Takahashi, Kunihito Nagayama

Thermophysics and Fluid Mechanics

Research output: Contribution to journal › Article › peer-review

45 Citations (Scopus)

Abstract

Amorphous carbon films and diamond like carbon films were grown by pulsed laser deposition (PLD) using different laser wavelengths (λ=193 nm, 532 nm, 1064 nm) and substrate temperatures (from room temperature to 500°C). The morphology of the film surface was observed using an atomic force microscope (AFM) and a scanning electron microscope (SEM). Mechanisms for film growth are explained qualitatively using the subplantation model. All films showed the occasional incorporation of spherical particles with a diameter of 1-10 μm ejected from the targets due to surface being melted.

Original language	English
Pages (from-to)	129-137
Number of pages	9
Journal	Applied Surface Science
Volume	141
Issue number	1-2
DOIs	https://doi.org/10.1016/S0169-4332(98)00601-1
Publication status	Published - Mar 1999

All Science Journal Classification (ASJC) codes

Chemistry(all)
Condensed Matter Physics
Physics and Astronomy(all)
Surfaces and Interfaces
Surfaces, Coatings and Films

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10.1016/S0169-4332(98)00601-1

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abstract = "Amorphous carbon films and diamond like carbon films were grown by pulsed laser deposition (PLD) using different laser wavelengths (λ=193 nm, 532 nm, 1064 nm) and substrate temperatures (from room temperature to 500°C). The morphology of the film surface was observed using an atomic force microscope (AFM) and a scanning electron microscope (SEM). Mechanisms for film growth are explained qualitatively using the subplantation model. All films showed the occasional incorporation of spherical particles with a diameter of 1-10 μm ejected from the targets due to surface being melted.",

author = "Tsuyoshi Yoshitake and Takashi Nishiyama and Hajime Aoki and Koji Suizu and Koji Takahashi and Kunihito Nagayama",

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AU - Yoshitake, Tsuyoshi

AU - Nishiyama, Takashi

AU - Aoki, Hajime

AU - Suizu, Koji

AU - Takahashi, Koji

AU - Nagayama, Kunihito

PY - 1999/3

Y1 - 1999/3

N2 - Amorphous carbon films and diamond like carbon films were grown by pulsed laser deposition (PLD) using different laser wavelengths (λ=193 nm, 532 nm, 1064 nm) and substrate temperatures (from room temperature to 500°C). The morphology of the film surface was observed using an atomic force microscope (AFM) and a scanning electron microscope (SEM). Mechanisms for film growth are explained qualitatively using the subplantation model. All films showed the occasional incorporation of spherical particles with a diameter of 1-10 μm ejected from the targets due to surface being melted.

AB - Amorphous carbon films and diamond like carbon films were grown by pulsed laser deposition (PLD) using different laser wavelengths (λ=193 nm, 532 nm, 1064 nm) and substrate temperatures (from room temperature to 500°C). The morphology of the film surface was observed using an atomic force microscope (AFM) and a scanning electron microscope (SEM). Mechanisms for film growth are explained qualitatively using the subplantation model. All films showed the occasional incorporation of spherical particles with a diameter of 1-10 μm ejected from the targets due to surface being melted.

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