Abstract
Amorphous carbon films and diamond like carbon films were grown by pulsed laser deposition (PLD) using different laser wavelengths (λ=193 nm, 532 nm, 1064 nm) and substrate temperatures (from room temperature to 500°C). The morphology of the film surface was observed using an atomic force microscope (AFM) and a scanning electron microscope (SEM). Mechanisms for film growth are explained qualitatively using the subplantation model. All films showed the occasional incorporation of spherical particles with a diameter of 1-10 μm ejected from the targets due to surface being melted.
Original language | English |
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Pages (from-to) | 129-137 |
Number of pages | 9 |
Journal | Applied Surface Science |
Volume | 141 |
Issue number | 1-2 |
DOIs | |
Publication status | Published - Mar 1999 |
All Science Journal Classification (ASJC) codes
- Chemistry(all)
- Condensed Matter Physics
- Physics and Astronomy(all)
- Surfaces and Interfaces
- Surfaces, Coatings and Films