Amorphous carbon films and diamond like carbon films were grown by pulsed laser deposition (PLD) using different laser wavelengths (λ=193 nm, 532 nm, 1064 nm) and substrate temperatures (from room temperature to 500°C). The morphology of the film surface was observed using an atomic force microscope (AFM) and a scanning electron microscope (SEM). Mechanisms for film growth are explained qualitatively using the subplantation model. All films showed the occasional incorporation of spherical particles with a diameter of 1-10 μm ejected from the targets due to surface being melted.
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Physics and Astronomy(all)
- Surfaces and Interfaces
- Surfaces, Coatings and Films