Atomic layer deposition of Pb(Zr,Ti)Ox thin films by a combination of binary atomic layer deposition processes

Takayuki Watanabe, Susanne Hoffmann-Eifert, Rainer Waser, Cheol Seong Hwang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

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Engineering & Materials Science

Chemical Compounds