Au-catalyst induced low temperature (∼250 °C) layer exchange crystallization for SiGe on insulator

Jong Hyeok Park, Masashi Kurosawa, Naoyuki Kawabata, Masanobu Miyao, Taizoh Sadoh

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Fingerprint Dive into the research topics of 'Au-catalyst induced low temperature (∼250 °C) layer exchange crystallization for SiGe on insulator'. Together they form a unique fingerprint.

Engineering & Materials Science