AuAu surface-activated bonding and Its application to optical microsensors with 3-D structure

Eiji Higurashi, Daisuke Chino, Tadatomo Suga, Renshi Sawada

    Research output: Contribution to journalArticlepeer-review

    82 Citations (Scopus)

    Abstract

    Hybrid integration of multiple optical chips in three dimensions is an important technology for realizing highly functional, compact optoelectronic microsystems. In this paper, we report successful 3-D integration of optical chips performed using AuAu surface-activated bonding (SAB) at a relatively low bonding temperature of 150°C. A glass substrate with the flip-chip-bonded photodiode chips was vertically stacked on a Si substrate with the bonded laser diode chip using AuAu SAB. By applying this technique, compact and thin optical microsensors (2.8 mm × 2.8 mm × 1 mm thick) were fabricated. The feasibility of measuring velocity was demonstrated using prototype microsensors.

    Original languageEnglish
    Article number5130228
    Pages (from-to)1500-1505
    Number of pages6
    JournalIEEE Journal on Selected Topics in Quantum Electronics
    Volume15
    Issue number5
    DOIs
    Publication statusPublished - Sep 1 2009

    All Science Journal Classification (ASJC) codes

    • Atomic and Molecular Physics, and Optics
    • Electrical and Electronic Engineering

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