AUTOMATIC THICKNESS MEASUREMENT OF A SINGLE Si CRYSTAL ISLAND SURROUNDED BY SiO//2 DIELECTRIC FILM AND POLYSILICON LAYER.

Renshi Sawada, Toshiroh Karaki, Junji Watanabe

    Research output: Contribution to journalArticlepeer-review

    Fingerprint Dive into the research topics of 'AUTOMATIC THICKNESS MEASUREMENT OF A SINGLE Si CRYSTAL ISLAND SURROUNDED BY SiO//2 DIELECTRIC FILM AND POLYSILICON LAYER.'. Together they form a unique fingerprint.

    Engineering & Materials Science