Basics and applications of advanced scanning electron microscopy

Research output: Contribution to journalArticle

Abstract

Recently, the effective spacial resolution of advanced scanning electron microscope (SEM) has been improved remarkably, especially under very low accelerating voltages. Moreover, it is possible to obtain easily various microstructural information by using several improved detectors. In this paper, the equipment configuration and the distinctive features of the advanced SEM are explained briefly, and then the practical applications using the advanced SEM are presented.

Original languageEnglish
Pages (from-to)619-624
Number of pages6
JournalKobunshi
Volume63
Issue number9
Publication statusPublished - Jan 1 2014
Externally publishedYes

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Electron microscopes
Scanning
Scanning electron microscopy
Detectors
Electric potential

All Science Journal Classification (ASJC) codes

  • Chemical Engineering(all)

Cite this

Basics and applications of advanced scanning electron microscopy. / Itakura, Masaru.

In: Kobunshi, Vol. 63, No. 9, 01.01.2014, p. 619-624.

Research output: Contribution to journalArticle

@article{27630ecad3fc4d16ac5fd42b868f0c76,
title = "Basics and applications of advanced scanning electron microscopy",
abstract = "Recently, the effective spacial resolution of advanced scanning electron microscope (SEM) has been improved remarkably, especially under very low accelerating voltages. Moreover, it is possible to obtain easily various microstructural information by using several improved detectors. In this paper, the equipment configuration and the distinctive features of the advanced SEM are explained briefly, and then the practical applications using the advanced SEM are presented.",
author = "Masaru Itakura",
year = "2014",
month = "1",
day = "1",
language = "English",
volume = "63",
pages = "619--624",
journal = "Kobunshi",
issn = "0454-1138",
publisher = "高分子学会",
number = "9",

}

TY - JOUR

T1 - Basics and applications of advanced scanning electron microscopy

AU - Itakura, Masaru

PY - 2014/1/1

Y1 - 2014/1/1

N2 - Recently, the effective spacial resolution of advanced scanning electron microscope (SEM) has been improved remarkably, especially under very low accelerating voltages. Moreover, it is possible to obtain easily various microstructural information by using several improved detectors. In this paper, the equipment configuration and the distinctive features of the advanced SEM are explained briefly, and then the practical applications using the advanced SEM are presented.

AB - Recently, the effective spacial resolution of advanced scanning electron microscope (SEM) has been improved remarkably, especially under very low accelerating voltages. Moreover, it is possible to obtain easily various microstructural information by using several improved detectors. In this paper, the equipment configuration and the distinctive features of the advanced SEM are explained briefly, and then the practical applications using the advanced SEM are presented.

UR - http://www.scopus.com/inward/record.url?scp=84908339335&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84908339335&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:84908339335

VL - 63

SP - 619

EP - 624

JO - Kobunshi

JF - Kobunshi

SN - 0454-1138

IS - 9

ER -