Basics and applications of advanced scanning electron microscopy

Research output: Contribution to journalArticle

Abstract

Recently, the effective spacial resolution of advanced scanning electron microscope (SEM) has been improved remarkably, especially under very low accelerating voltages. Moreover, it is possible to obtain easily various microstructural information by using several improved detectors. In this paper, the equipment configuration and the distinctive features of the advanced SEM are explained briefly, and then the practical applications using the advanced SEM are presented.

Original languageEnglish
Pages (from-to)619-624
Number of pages6
JournalKobunshi
Volume63
Issue number9
Publication statusPublished - Jan 1 2014
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Chemical Engineering(all)

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