Behavior of debris from laser-produced plasma for extreme ultraviolet light source measured by laser imaging technique

Hiroki Tanaka, Yuki Hashimoto, Kouji Tamaru, Akihiko Takahashi, Tatsuo Okada

Research output: Contribution to journalArticle

24 Citations (Scopus)

Abstract

The behavior of debris generated from a laser-produced plasma (LPP) for the extreme ultraviolet light source at 13.5 nm has been studied using a laser induced fluorescence (LIF) imaging system. Tin (Sn) LPPs were produced by irradiating a flat Sn plate and Sn thin films perpendicularly with a Nd:YAG laser beam. When a thin Sn film was used as a target material, the depletion of the Sn atoms was clearly observed along the Nd:YAG laser beam. The LIF system was also used for visualizing the sputtering process of a mirror substrate by the fast ions generated from the plasma.

Original languageEnglish
Article number181109
JournalApplied Physics Letters
Volume89
Issue number18
DOIs
Publication statusPublished - Nov 13 2006

Fingerprint

laser plasmas
debris
imaging techniques
ultraviolet radiation
laser induced fluorescence
YAG lasers
light sources
laser beams
flat plates
thin films
lasers
tin
depletion
sputtering
mirrors
atoms
ions

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

Cite this

Behavior of debris from laser-produced plasma for extreme ultraviolet light source measured by laser imaging technique. / Tanaka, Hiroki; Hashimoto, Yuki; Tamaru, Kouji; Takahashi, Akihiko; Okada, Tatsuo.

In: Applied Physics Letters, Vol. 89, No. 18, 181109, 13.11.2006.

Research output: Contribution to journalArticle

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