Boiling heat transfer from a silicon chip immersed in degassed and gas-dissolved FC72

Effects by size and number density of micro-reentrant cavities

H. Kubo, Hiroshi Takamatsu, H. Honda

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Boiling heat transfer of FC-72 from newly developed treated surfaces with micro-reentrant cavities was studied experimentally. The surface structure was fabricated on a silicon chip by use of microelectronic fabrication techniques. Four kinds of treated surfaces with the combinations of two cavity mouth diameters (about 1.6 μm and 3.1 μm) and two number densities of the micro-reentrant cavities (81 1/cm2 and 96 × 103 1/cm2) were tested along with a smooth surface. Experiments were conducted at the liquid subcoolings of 3 K and 25 K with degassed and gas-dissolved FC-72. While the wall superheat at boiling incipience was strongly dependent on the dissolved gas content; it was little affected by the cavity mouth diameter and the liquid subcooling. The heat transfer performance of the treated surface was considerably higher than that of the smooth surface. The highest performance was obtained with a treated surface with a larger cavity mouth diameter and a larger cavity number density. The results were compared with those for previously developed treated surfaces.

Original languageEnglish
Pages (from-to)269-278
Number of pages10
JournalJournal of Enhanced Heat Transfer
Volume24
Issue number1-6
Publication statusPublished - Jan 1 2017

Fingerprint

dissolved gases
Silicon
boiling
Boiling liquids
Gases
heat transfer
chips
Heat transfer
cavities
silicon
mouth
Liquids
Microelectronics
Surface structure
liquids
microelectronics
Fabrication
fabrication

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Mechanical Engineering
  • Fluid Flow and Transfer Processes

Cite this

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title = "Boiling heat transfer from a silicon chip immersed in degassed and gas-dissolved FC72: Effects by size and number density of micro-reentrant cavities",
abstract = "Boiling heat transfer of FC-72 from newly developed treated surfaces with micro-reentrant cavities was studied experimentally. The surface structure was fabricated on a silicon chip by use of microelectronic fabrication techniques. Four kinds of treated surfaces with the combinations of two cavity mouth diameters (about 1.6 μm and 3.1 μm) and two number densities of the micro-reentrant cavities (81 1/cm2 and 96 × 103 1/cm2) were tested along with a smooth surface. Experiments were conducted at the liquid subcoolings of 3 K and 25 K with degassed and gas-dissolved FC-72. While the wall superheat at boiling incipience was strongly dependent on the dissolved gas content; it was little affected by the cavity mouth diameter and the liquid subcooling. The heat transfer performance of the treated surface was considerably higher than that of the smooth surface. The highest performance was obtained with a treated surface with a larger cavity mouth diameter and a larger cavity number density. The results were compared with those for previously developed treated surfaces.",
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T2 - Effects by size and number density of micro-reentrant cavities

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AU - Takamatsu, Hiroshi

AU - Honda, H.

PY - 2017/1/1

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N2 - Boiling heat transfer of FC-72 from newly developed treated surfaces with micro-reentrant cavities was studied experimentally. The surface structure was fabricated on a silicon chip by use of microelectronic fabrication techniques. Four kinds of treated surfaces with the combinations of two cavity mouth diameters (about 1.6 μm and 3.1 μm) and two number densities of the micro-reentrant cavities (81 1/cm2 and 96 × 103 1/cm2) were tested along with a smooth surface. Experiments were conducted at the liquid subcoolings of 3 K and 25 K with degassed and gas-dissolved FC-72. While the wall superheat at boiling incipience was strongly dependent on the dissolved gas content; it was little affected by the cavity mouth diameter and the liquid subcooling. The heat transfer performance of the treated surface was considerably higher than that of the smooth surface. The highest performance was obtained with a treated surface with a larger cavity mouth diameter and a larger cavity number density. The results were compared with those for previously developed treated surfaces.

AB - Boiling heat transfer of FC-72 from newly developed treated surfaces with micro-reentrant cavities was studied experimentally. The surface structure was fabricated on a silicon chip by use of microelectronic fabrication techniques. Four kinds of treated surfaces with the combinations of two cavity mouth diameters (about 1.6 μm and 3.1 μm) and two number densities of the micro-reentrant cavities (81 1/cm2 and 96 × 103 1/cm2) were tested along with a smooth surface. Experiments were conducted at the liquid subcoolings of 3 K and 25 K with degassed and gas-dissolved FC-72. While the wall superheat at boiling incipience was strongly dependent on the dissolved gas content; it was little affected by the cavity mouth diameter and the liquid subcooling. The heat transfer performance of the treated surface was considerably higher than that of the smooth surface. The highest performance was obtained with a treated surface with a larger cavity mouth diameter and a larger cavity number density. The results were compared with those for previously developed treated surfaces.

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