Bonding of LINBO3 thin film on Si substrate using laser irradiation

Hiroki Kawano, Ryo Takigawa, Hiroshi Ikenoue, Tanemasa Asano

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Preparation of lithium niobate thin-film on silicon is demonstrated. The process employed is composed of mechanical thinning of the lithium niobate and bonding by using laser irradiation to the face-to-face interface of the two materials. The process is performed in the ambient air while keeping the wafers at room temperature.

Original languageEnglish
Title of host publicationMOC 2015 - Technical Digest of 20th Microoptics Conference
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9784863485433
DOIs
Publication statusPublished - Feb 23 2016
Event20th Microoptics Conference, MOC 2015 - Fukuoka, Japan
Duration: Oct 25 2015Oct 28 2015

Other

Other20th Microoptics Conference, MOC 2015
CountryJapan
CityFukuoka
Period10/25/1510/28/15

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All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics
  • Electronic, Optical and Magnetic Materials

Cite this

Kawano, H., Takigawa, R., Ikenoue, H., & Asano, T. (2016). Bonding of LINBO3 thin film on Si substrate using laser irradiation. In MOC 2015 - Technical Digest of 20th Microoptics Conference [7416527] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MOC.2015.7416527