Bonding of LINBO3 thin film on Si substrate using laser irradiation

Research output: Chapter in Book/Report/Conference proceedingConference contribution


Preparation of lithium niobate thin-film on silicon is demonstrated. The process employed is composed of mechanical thinning of the lithium niobate and bonding by using laser irradiation to the face-to-face interface of the two materials. The process is performed in the ambient air while keeping the wafers at room temperature.

Original languageEnglish
Title of host publicationMOC 2015 - Technical Digest of 20th Microoptics Conference
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9784863485433
Publication statusPublished - Feb 23 2016
Event20th Microoptics Conference, MOC 2015 - Fukuoka, Japan
Duration: Oct 25 2015Oct 28 2015


Other20th Microoptics Conference, MOC 2015

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics
  • Electronic, Optical and Magnetic Materials


Dive into the research topics of 'Bonding of LINBO3 thin film on Si substrate using laser irradiation'. Together they form a unique fingerprint.

Cite this