Abstract
Boron-doped nanocrystalline diamond/hydrogenated amorphous carbon composite films were prepared by coaxial arc plasma deposition. The Xray diffraction measurement exhibited that the diamond grain size is remarkably increased from 2nm (undoped films) to 82 nm and the lattices of the grains are dilated accompanied by the incorporation of boron atoms into the lattices. The near-edge X-ray absorption fine-structure showed a weak exciton peak of diamond due to the enlarged grains. The enhanced growth mechanism is discussed on the basis of a defect-induced diamond growth model.
Original language | English |
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Article number | 078003 |
Journal | Japanese journal of applied physics |
Volume | 51 |
Issue number | 7 PART 1 |
DOIs | |
Publication status | Published - Jul 2012 |
All Science Journal Classification (ASJC) codes
- Engineering(all)
- Physics and Astronomy(all)