Boron nitride microfibers grown by plasma-assisted laser chemical vapor deposition without a metal catalyst

Shojiro Komatsu, Daisuke Kazami, Hironori Tanaka, Yoshiki Shimizu, Yusuke Moriyoshi, Masaharu Shiratani, Katsuyuki Okada

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)

Abstract

Boron nitride fibers were found to grow on polycrystalline nickel and Si(100) substrates by plasma-assisted laser chemical vapor deposition from B2 H6 + NH3 using an excimer laser at 193 nm. Their diameter was typically a few hundreds of nanometers, while the length was a few tens of micrometers. They were stoichiometric or boron-rich BN in chemical composition. When the substrate was rotated during deposition, spiral fibers were found to grow. We conclude that they grew with the help of laser light by other than the vapor - liquid - solid mechanism.

Original languageEnglish
Article number151914
JournalApplied Physics Letters
Volume88
Issue number15
DOIs
Publication statusPublished - Apr 10 2006

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

Fingerprint

Dive into the research topics of 'Boron nitride microfibers grown by plasma-assisted laser chemical vapor deposition without a metal catalyst'. Together they form a unique fingerprint.

Cite this