Boron nitride fibers were found to grow on polycrystalline nickel and Si(100) substrates by plasma-assisted laser chemical vapor deposition from B2 H6 + NH3 using an excimer laser at 193 nm. Their diameter was typically a few hundreds of nanometers, while the length was a few tens of micrometers. They were stoichiometric or boron-rich BN in chemical composition. When the substrate was rotated during deposition, spiral fibers were found to grow. We conclude that they grew with the help of laser light by other than the vapor - liquid - solid mechanism.
All Science Journal Classification (ASJC) codes
- Physics and Astronomy (miscellaneous)