Boron nitride microfibers grown by plasma-assisted laser chemical vapor deposition without a metal catalyst

Shojiro Komatsu; Daisuke Kazami; Hironori Tanaka; Yoshiki Shimizu; Yusuke Moriyoshi; Masaharu Shiratani; Katsuyuki Okada

doi:10.1063/1.2188381

Boron nitride microfibers grown by plasma-assisted laser chemical vapor deposition without a metal catalyst

Shojiro Komatsu, Daisuke Kazami, Hironori Tanaka, Yoshiki Shimizu, Yusuke Moriyoshi, Masaharu Shiratani, Katsuyuki Okada

Electronic Devices

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

Boron nitride fibers were found to grow on polycrystalline nickel and Si(100) substrates by plasma-assisted laser chemical vapor deposition from B2 H6 + NH3 using an excimer laser at 193 nm. Their diameter was typically a few hundreds of nanometers, while the length was a few tens of micrometers. They were stoichiometric or boron-rich BN in chemical composition. When the substrate was rotated during deposition, spiral fibers were found to grow. We conclude that they grew with the help of laser light by other than the vapor - liquid - solid mechanism.

Original language	English
Article number	151914
Journal	Applied Physics Letters
Volume	88
Issue number	15
DOIs	https://doi.org/10.1063/1.2188381
Publication status	Published - Apr 10 2006

All Science Journal Classification (ASJC) codes

Physics and Astronomy (miscellaneous)

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10.1063/1.2188381

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title = "Boron nitride microfibers grown by plasma-assisted laser chemical vapor deposition without a metal catalyst",

abstract = "Boron nitride fibers were found to grow on polycrystalline nickel and Si(100) substrates by plasma-assisted laser chemical vapor deposition from B2 H6 + NH3 using an excimer laser at 193 nm. Their diameter was typically a few hundreds of nanometers, while the length was a few tens of micrometers. They were stoichiometric or boron-rich BN in chemical composition. When the substrate was rotated during deposition, spiral fibers were found to grow. We conclude that they grew with the help of laser light by other than the vapor - liquid - solid mechanism.",

author = "Shojiro Komatsu and Daisuke Kazami and Hironori Tanaka and Yoshiki Shimizu and Yusuke Moriyoshi and Masaharu Shiratani and Katsuyuki Okada",

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T1 - Boron nitride microfibers grown by plasma-assisted laser chemical vapor deposition without a metal catalyst

AU - Komatsu, Shojiro

AU - Kazami, Daisuke

AU - Tanaka, Hironori

AU - Shimizu, Yoshiki

AU - Moriyoshi, Yusuke

AU - Shiratani, Masaharu

AU - Okada, Katsuyuki

PY - 2006/4/10

Y1 - 2006/4/10

N2 - Boron nitride fibers were found to grow on polycrystalline nickel and Si(100) substrates by plasma-assisted laser chemical vapor deposition from B2 H6 + NH3 using an excimer laser at 193 nm. Their diameter was typically a few hundreds of nanometers, while the length was a few tens of micrometers. They were stoichiometric or boron-rich BN in chemical composition. When the substrate was rotated during deposition, spiral fibers were found to grow. We conclude that they grew with the help of laser light by other than the vapor - liquid - solid mechanism.

AB - Boron nitride fibers were found to grow on polycrystalline nickel and Si(100) substrates by plasma-assisted laser chemical vapor deposition from B2 H6 + NH3 using an excimer laser at 193 nm. Their diameter was typically a few hundreds of nanometers, while the length was a few tens of micrometers. They were stoichiometric or boron-rich BN in chemical composition. When the substrate was rotated during deposition, spiral fibers were found to grow. We conclude that they grew with the help of laser light by other than the vapor - liquid - solid mechanism.

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Boron nitride microfibers grown by plasma-assisted laser chemical vapor deposition without a metal catalyst

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