Abstract
The translational diffusion coefficient analysis with help of the rotational diffusion coefficient analysis is applied to determine the particle size distribution (PSD) of abrasive particles in slurry. The fluorescence anisotropy analysis (FPA) can determine the integration of the temperature over the viscosity for nano-area. In this paper, we perform the fundamental experiment to evaluate the viscosity of the solvent by using FPA and verify the feasibility to determine PSD from both the translational diffusion coefficient and the rotational diffusion coefficient.
| Original language | English |
|---|---|
| Title of host publication | 2015 International Conference on Planarization/CMP Technology, ICPT 2015 |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| ISBN (Electronic) | 9781619565104 |
| Publication status | Published - Feb 17 2016 |
| Event | International Conference on Planarization/CMP Technology, ICPT 2015 - Chandler, United States Duration: Sep 30 2015 → Oct 2 2015 |
Other
| Other | International Conference on Planarization/CMP Technology, ICPT 2015 |
|---|---|
| Country | United States |
| City | Chandler |
| Period | 9/30/15 → 10/2/15 |
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All Science Journal Classification (ASJC) codes
- Process Chemistry and Technology
- Electronic, Optical and Magnetic Materials
Cite this
Brownian diffusion analysis for nano-abrasives in CMP slurry by using fluorescence polarization method. / Hayashi, Terutake; Toshiki, Seri; Kurokawa, Syuhei.
2015 International Conference on Planarization/CMP Technology, ICPT 2015. Institute of Electrical and Electronics Engineers Inc., 2016. 7411985.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Brownian diffusion analysis for nano-abrasives in CMP slurry by using fluorescence polarization method
AU - Hayashi, Terutake
AU - Toshiki, Seri
AU - Kurokawa, Syuhei
PY - 2016/2/17
Y1 - 2016/2/17
N2 - The translational diffusion coefficient analysis with help of the rotational diffusion coefficient analysis is applied to determine the particle size distribution (PSD) of abrasive particles in slurry. The fluorescence anisotropy analysis (FPA) can determine the integration of the temperature over the viscosity for nano-area. In this paper, we perform the fundamental experiment to evaluate the viscosity of the solvent by using FPA and verify the feasibility to determine PSD from both the translational diffusion coefficient and the rotational diffusion coefficient.
AB - The translational diffusion coefficient analysis with help of the rotational diffusion coefficient analysis is applied to determine the particle size distribution (PSD) of abrasive particles in slurry. The fluorescence anisotropy analysis (FPA) can determine the integration of the temperature over the viscosity for nano-area. In this paper, we perform the fundamental experiment to evaluate the viscosity of the solvent by using FPA and verify the feasibility to determine PSD from both the translational diffusion coefficient and the rotational diffusion coefficient.
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UR - http://www.scopus.com/inward/citedby.url?scp=84964452818&partnerID=8YFLogxK
M3 - Conference contribution
BT - 2015 International Conference on Planarization/CMP Technology, ICPT 2015
PB - Institute of Electrical and Electronics Engineers Inc.
ER -