Brownian diffusion analysis for nano-abrasives in CMP slurry by using fluorescence polarization method

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The translational diffusion coefficient analysis with help of the rotational diffusion coefficient analysis is applied to determine the particle size distribution (PSD) of abrasive particles in slurry. The fluorescence anisotropy analysis (FPA) can determine the integration of the temperature over the viscosity for nano-area. In this paper, we perform the fundamental experiment to evaluate the viscosity of the solvent by using FPA and verify the feasibility to determine PSD from both the translational diffusion coefficient and the rotational diffusion coefficient.

Original languageEnglish
Title of host publication2015 International Conference on Planarization/CMP Technology, ICPT 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781619565104
Publication statusPublished - Feb 17 2016
EventInternational Conference on Planarization/CMP Technology, ICPT 2015 - Chandler, United States
Duration: Sep 30 2015Oct 2 2015

Publication series

Name2015 International Conference on Planarization/CMP Technology, ICPT 2015

Other

OtherInternational Conference on Planarization/CMP Technology, ICPT 2015
Country/TerritoryUnited States
CityChandler
Period9/30/1510/2/15

All Science Journal Classification (ASJC) codes

  • Process Chemistry and Technology
  • Electronic, Optical and Magnetic Materials

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