@inproceedings{6e4ec42bea1e42a78beeaf53f84b8924,
title = "Brownian diffusion analysis for nano-abrasives in CMP slurry by using fluorescence polarization method",
abstract = "The translational diffusion coefficient analysis with help of the rotational diffusion coefficient analysis is applied to determine the particle size distribution (PSD) of abrasive particles in slurry. The fluorescence anisotropy analysis (FPA) can determine the integration of the temperature over the viscosity for nano-area. In this paper, we perform the fundamental experiment to evaluate the viscosity of the solvent by using FPA and verify the feasibility to determine PSD from both the translational diffusion coefficient and the rotational diffusion coefficient.",
author = "Terutake Hayashi and Seri Toshiki and Syuhei Kurokawa",
year = "2016",
month = feb,
day = "17",
language = "English",
series = "2015 International Conference on Planarization/CMP Technology, ICPT 2015",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2015 International Conference on Planarization/CMP Technology, ICPT 2015",
address = "United States",
note = "International Conference on Planarization/CMP Technology, ICPT 2015 ; Conference date: 30-09-2015 Through 02-10-2015",
}