A solid-state C O2 sensor device using a metal-insulator-silicon carbide (MISiC) capacitor combined with a Li2 C O3 -BaC O3 auxiliary layer was fabricated and tested for its basic sensing properties. The MISiC-based C O2 sensor attached with the carbonate showed typical capacitance-voltage (C-V) properties in air at 400°C, and the sensor device responded well to changes in C O2 concentration in air at 400°C. The sensor signals were directly proportional to the logarithm of C O2 concentration. The results suggested that an electrochemical reaction of C O2 occurred at the interface between the carbonate layer and the electrode, causing the applied voltage to shift in response to C O2.
All Science Journal Classification (ASJC) codes
- Chemical Engineering(all)
- Materials Science(all)
- Physical and Theoretical Chemistry
- Electrical and Electronic Engineering