Capacitive-type gas sensors combining silicon semiconductor and NaNO 2-based solid electrolyte for NO2 detection

Cyrus Zamani; Kengo Shimanoe; Noboru Yamazoe

doi:10.1016/j.snb.2004.12.061

Capacitive-type gas sensors combining silicon semiconductor and NaNO ₂-based solid electrolyte for NO₂ detection

Cyrus Zamani, Kengo Shimanoe, Noboru Yamazoe

Functional Materials Science

Research output: Contribution to journal › Article

12 Citations (Scopus)

Abstract

A capacitive-type NO₂ gas sensor, developed by replacing metal in metal-insulator-semiconductor structure with solid electrolyte as sensing material, was investigated to improve the response and recovery rates and the operating temperature by modifying NaNO₂-sensing material. Binary sensing materials of NaNO₂-Ca₃(PO₄)₂ and NaNO₂-WO₃ were tested for auxiliary phase of the device. The Ca₃(PO₄)₂-containing phase showed a response closer to ideal Nernstian behavior at 140 °C as compared to WO₃-containing phase. On the other hand, the WO₃- containing phase showed faster response and recovery rates at 160 °C, while the response deviated from Nernstian correlation. In order to obtain optimum sensor response, a ternary phase of NaNO₂-Ca₃(PO ₄)₂-WO₃ was used as sensing phase. The device with ternary auxiliary phase was found to show more stable and faster response and recovery rates at 130 °C, as compared to previous devices attached with binary phases, corresponding Nernstian correlation in the concentration range of 20-500 ppb NO₂. Furthermore, the effects of modification process on the auxiliary phase were investigated through SEM observation of the surface structures and measurement of ionic conductivity.

Original language	English
Pages (from-to)	300-306
Number of pages	7
Journal	Sensors and Actuators, B: Chemical
Volume	109
Issue number	2
DOIs	https://doi.org/10.1016/j.snb.2004.12.061
Publication status	Published - Sep 14 2005

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering
Materials Chemistry

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Zamani, C., Shimanoe, K., & Yamazoe, N. (2005). Capacitive-type gas sensors combining silicon semiconductor and NaNO ₂-based solid electrolyte for NO₂ detection. Sensors and Actuators, B: Chemical, 109(2), 300-306. https://doi.org/10.1016/j.snb.2004.12.061

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abstract = "A capacitive-type NO2 gas sensor, developed by replacing metal in metal-insulator-semiconductor structure with solid electrolyte as sensing material, was investigated to improve the response and recovery rates and the operating temperature by modifying NaNO2-sensing material. Binary sensing materials of NaNO2-Ca3(PO4)2 and NaNO2-WO3 were tested for auxiliary phase of the device. The Ca3(PO4)2-containing phase showed a response closer to ideal Nernstian behavior at 140 °C as compared to WO3-containing phase. On the other hand, the WO3- containing phase showed faster response and recovery rates at 160 °C, while the response deviated from Nernstian correlation. In order to obtain optimum sensor response, a ternary phase of NaNO2-Ca3(PO 4)2-WO3 was used as sensing phase. The device with ternary auxiliary phase was found to show more stable and faster response and recovery rates at 130 °C, as compared to previous devices attached with binary phases, corresponding Nernstian correlation in the concentration range of 20-500 ppb NO2. Furthermore, the effects of modification process on the auxiliary phase were investigated through SEM observation of the surface structures and measurement of ionic conductivity.",

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