Abstract
A capacitive-type NO2 gas sensor, developed by replacing metal in metal-insulator-semiconductor structure with solid electrolyte as sensing material, was investigated to improve the response and recovery rates and the operating temperature by modifying NaNO2-sensing material. Binary sensing materials of NaNO2-Ca3(PO4)2 and NaNO2-WO3 were tested for auxiliary phase of the device. The Ca3(PO4)2-containing phase showed a response closer to ideal Nernstian behavior at 140 °C as compared to WO3-containing phase. On the other hand, the WO3- containing phase showed faster response and recovery rates at 160 °C, while the response deviated from Nernstian correlation. In order to obtain optimum sensor response, a ternary phase of NaNO2-Ca3(PO 4)2-WO3 was used as sensing phase. The device with ternary auxiliary phase was found to show more stable and faster response and recovery rates at 130 °C, as compared to previous devices attached with binary phases, corresponding Nernstian correlation in the concentration range of 20-500 ppb NO2. Furthermore, the effects of modification process on the auxiliary phase were investigated through SEM observation of the surface structures and measurement of ionic conductivity.
| Original language | English |
|---|---|
| Pages (from-to) | 300-306 |
| Number of pages | 7 |
| Journal | Sensors and Actuators, B: Chemical |
| Volume | 109 |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - Sep 14 2005 |
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All Science Journal Classification (ASJC) codes
- Analytical Chemistry
- Electrochemistry
- Electrical and Electronic Engineering
Cite this
Capacitive-type gas sensors combining silicon semiconductor and NaNO 2-based solid electrolyte for NO2 detection. / Zamani, Cyrus; Shimanoe, Kengo; Yamazoe, Noboru.
In: Sensors and Actuators, B: Chemical, Vol. 109, No. 2, 14.09.2005, p. 300-306.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Capacitive-type gas sensors combining silicon semiconductor and NaNO 2-based solid electrolyte for NO2 detection
AU - Zamani, Cyrus
AU - Shimanoe, Kengo
AU - Yamazoe, Noboru
PY - 2005/9/14
Y1 - 2005/9/14
N2 - A capacitive-type NO2 gas sensor, developed by replacing metal in metal-insulator-semiconductor structure with solid electrolyte as sensing material, was investigated to improve the response and recovery rates and the operating temperature by modifying NaNO2-sensing material. Binary sensing materials of NaNO2-Ca3(PO4)2 and NaNO2-WO3 were tested for auxiliary phase of the device. The Ca3(PO4)2-containing phase showed a response closer to ideal Nernstian behavior at 140 °C as compared to WO3-containing phase. On the other hand, the WO3- containing phase showed faster response and recovery rates at 160 °C, while the response deviated from Nernstian correlation. In order to obtain optimum sensor response, a ternary phase of NaNO2-Ca3(PO 4)2-WO3 was used as sensing phase. The device with ternary auxiliary phase was found to show more stable and faster response and recovery rates at 130 °C, as compared to previous devices attached with binary phases, corresponding Nernstian correlation in the concentration range of 20-500 ppb NO2. Furthermore, the effects of modification process on the auxiliary phase were investigated through SEM observation of the surface structures and measurement of ionic conductivity.
AB - A capacitive-type NO2 gas sensor, developed by replacing metal in metal-insulator-semiconductor structure with solid electrolyte as sensing material, was investigated to improve the response and recovery rates and the operating temperature by modifying NaNO2-sensing material. Binary sensing materials of NaNO2-Ca3(PO4)2 and NaNO2-WO3 were tested for auxiliary phase of the device. The Ca3(PO4)2-containing phase showed a response closer to ideal Nernstian behavior at 140 °C as compared to WO3-containing phase. On the other hand, the WO3- containing phase showed faster response and recovery rates at 160 °C, while the response deviated from Nernstian correlation. In order to obtain optimum sensor response, a ternary phase of NaNO2-Ca3(PO 4)2-WO3 was used as sensing phase. The device with ternary auxiliary phase was found to show more stable and faster response and recovery rates at 130 °C, as compared to previous devices attached with binary phases, corresponding Nernstian correlation in the concentration range of 20-500 ppb NO2. Furthermore, the effects of modification process on the auxiliary phase were investigated through SEM observation of the surface structures and measurement of ionic conductivity.
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UR - http://www.scopus.com/inward/citedby.url?scp=22944475791&partnerID=8YFLogxK
U2 - 10.1016/j.snb.2004.12.061
DO - 10.1016/j.snb.2004.12.061
M3 - Article
AN - SCOPUS:22944475791
VL - 109
SP - 300
EP - 306
JO - Sensors and Actuators, B: Chemical
JF - Sensors and Actuators, B: Chemical
SN - 0925-4005
IS - 2
ER -